Dual-Gas Sensor Based on the Pt NPs/AlGaN/GaN High Electron Mobility Transistor for H and NH Gases Detection<sub/><sub/>

被引：1

作者：

Su, Huan ^{[1
,2
]}

Wang, Yunkai ^{[1
,2
]}

Xu, Fang ^{[3
]}

Dai, Longhui ^{[1
,2
]}

Fan, Ping ^{[1
,2
]}

Luo, Jingting ^{[1
,2
]}

Zhong, Aihua ^{[1
,2
]}

机构：

[1] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China

[2] Shenzhen Univ, Coll Phys & Optoelect Engn, Shenzhen Key Lab Adv Thin Films & Applicat, Shenzhen 518060, Peoples R China

[3] Shenzhen Technol Univ, Coll Engn Phys, Key Lab Ultraintense Laser & Adv Mat Technol, Shenzhen 518118, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2024年 / 24卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Sensors; Gas detectors; HEMTs; Logic gates; Temperature sensors; Wide band gap semiconductors; Metals; Ammonia gas sensor; dual-gas detection; fast response speed; high electron mobility transistor (HEMT); AMMONIA SENSOR; RANGE;

D O I：

10.1109/JSEN.2023.3332036

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Multisensitive gas sensors have been drawingincreasing attention in recent years. In this work, dual-gas detection of hydrogen (H-2) and ammonia (NH3) isdemonstrated based on the Pt NPs/AlGaN/GaN high elec-tron mobility transistor (HEMT) device by solely tuning theoperating temperature. Scanning electron microscopy (SEM)and atomic force microscope (AFM) results show that the3 nm-thick Pt layer is a porous film with roughness of 1.2 nm.According to the I-d-V-g curves, the device has a pronounced pinch-off characteristic with an on-to-off ratio of five ordersof magnitude. Interestingly, this device is a H(2)gas sensorbelow 150(degrees)C and it changes to NH(3)gas sensor above 180 degrees C.Our sensor has a high response of 280.4% at 200 ppm NH(3)gas and an ultrafast response time of 4 s at 220(degrees)C. Experimentally, the device has a clear response of 1.9% at 100 ppb,indicating very low limit of detection (LOD). The capability ofdual-gas detection makes it attractive for multigas detectionand electronic nose.

引用

页码：92 / 100

页数：9

共 54 条

[1] Breath ammonia sensor based on conducting polymer nanojunctions [J].