[1] Tongji Univ, Inst Precis Opt Engn, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China
[2] MOE Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China
[3] Tongji Univ, Shanghai Inst Intelligent Sci & Technol, Shanghai 200092, Peoples R China
[4] Shanghai Frontiers Sci Ctr Digital Opt, Shanghai 200092, Peoples R China
[5] Natl Inst Metrol, Technol Innovat Ctr Mass Spectrometry State Market, Ctr Adv Measurement Sci, Beijing 100029, Peoples R China
[6] Shanghai Jiao Tong Univ, Natl Key Lab Adv Micro & Nano Manufacture Technol, Shanghai 200240, Peoples R China
[7] Natl Cheng Kung Univ, Dept Photon, Tainan 70101, Taiwan
[8] Natl Cheng Kung Univ, Ctr Quantum Frontiers Res & Technol QFort, Tainan 70101, Taiwan