Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

The fabrication of flexible pressure sensors with lowcost, highscalability, and easy fabrication is an essential driving force indeveloping flexible electronics, especially for high-performance sensorsthat require precise surface microstructures. However, optimizingcomplex fabrication processes and expensive microfabrication methodsremains a significant challenge. In this study, we introduce a laserpyrolysis direct writing technology that enables rapid and efficientfabrication of high-performance flexible pressure sensors with a micro-truncatedpyramid array. The pressure sensor demonstrates exceptional sensitivities,with the values of 3132.0, 322.5, and 27.8 kPa(-1) in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10kPa, respectively. Furthermore, the sensor exhibits rapid responsetimes (loading: 22 ms, unloading: 18 ms) and exceptional reliability,enduring over 3000 pressure loading and unloading cycles. Moreover,the pressure sensor can be easily integrated into a sensor array forspatial pressure distribution detection. The laser pyrolysis directwriting technology introduced in this study presents a highly efficientand promising approach to designing and fabricating high-performanceflexible pressure sensors utilizing micro-structured polymer substrates.