Flexible waveguide integrated thermo-optic switch based on TiO2 platform

被引:3
|
作者
Chen, Zequn [1 ,2 ,3 ]
Wei, Maoliang [4 ,5 ]
Sun, Boshu [2 ,3 ]
Weng, Yang [2 ,3 ]
Jian, Jialing [2 ,3 ]
Zhong, Chuyu [4 ,5 ]
Sun, Chunlei [2 ,3 ]
Si, Ke [4 ]
Gong, Wei [4 ]
Lin, Hongtao [4 ,5 ]
Li, Lan [2 ,3 ]
机构
[1] Zhejiang Univ, Hangzhou 310027, Peoples R China
[2] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zhe, Hangzhou 310024, Peoples R China
[3] Westlake Inst Adv Study, Inst Adv Technol, Hangzhou 310024, Peoples R China
[4] Zhejiang Univ, MOE Frontier Sci Ctr Brain Sci & Brain Machine Int, Hangzhou 310027, Peoples R China
[5] Zhejiang Univ, Coll Informat Sci & Elect Engineer, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
基金
中国国家自然科学基金;
关键词
PHOTONIC DEVICES; INDEX-CONTRAST; SILICON; EFFICIENT; CIRCUITS; PROBES;
D O I
10.1364/OL.484113
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Mechanically flexible photonic devices are critical compo-nents of novel bio-integrated optoelectronic and high-end wearable systems, in which thermo-optic switches (TOSs) as optical signal control devices are crucial. In this paper, flex-ible titanium oxide (TiO2) TOSs based on a Mach-Zehnder interferometer (MZI) structure were demonstrated around 1310 nm for, it is believed, the first time. The insertion loss of flexible passive TiO2 2 x 2 multi-mode interferometers (MMIs) is -3.1 dB per MMI. The demonstrated flexible TOS achieves power consumption (P & pi;) of 0.83 mW, com-pared with its rigid counterpart, for which P & pi; is decreased by a factor of 18. The proposed device could withstand 100 consecutive bending operations without noticeable degrada-tion in TOS performance, indicating excellent mechanical stability. These results provide a new perspective for design-ing and fabricating flexible TOSs for flexible optoelectronic systems in future emerging applications. & COPY; 2023 Optica Pub-lishing Group
引用
收藏
页码:3239 / 3242
页数:4
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