Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

被引：6

作者：

Torkashvand, Ziba ^{[1
]}

Shayeganfar, Farzaneh ^{[1
]}

Ramazani, Ali ^{[2
]}

机构：

[1] Amirkabir Univ Technol, Dept Phys & Energy Engn, Tehran, Iran

[2] MIT, Dept Mech Engn, Cambridge, MA 02139 USA

来源：

MICROMACHINES | 2024年 / 15卷 / 02期

关键词：

micro-electromechanical systems; nanoelectromechanical systems; two-dimensional (2D) materials; sensors; accelerometers; microphones; electronic; optical and mechanical properties; ARTIFICIAL DNA NANOSTRUCTURES; GRAPHENE; ENERGY; LITHOGRAPHY; FABRICATION; MECHANISM; COATINGS; SENSORS;

D O I：

10.3390/mi15020175

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.

引用

页数：19

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