Novel Asymmetric Operation Scheme for HfO2-Based FeRAM Based on Reconstruction of Ferroelectric Dynamics Impacts

被引:1
作者
Fu, Zhiyuan [1 ]
Wang, Kaifeng [1 ]
Xu, Shaodi [1 ]
Huang, Qianqian [1 ,2 ,3 ]
Huang, Ru [2 ,3 ]
机构
[1] Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
[2] Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China
[3] Beijing Adv Innovat Ctr Integrated Circuits, Beijing 100871, Peoples R China
关键词
Switches; Iron; Random access memory; Nonvolatile memory; Ferroelectric films; Pulse measurements; Capacitors; ferroelectricity; ferroelectric switching dynamic; HZO; FUTURE;
D O I
10.1109/LED.2023.3330994
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, with the consideration of pulsing sequence of FeRAM operation, the impacts of hafnia-based ferroelectric (FE) dynamics on polarization switching and memory window (MW) are experimentally investigated. For the first time, it is found that additional polarization switching when read "0" (P-SW0) occurs, and the change of P-SW0 is non-monotonical with varied pulse width. Moreover, the impact of P-SW0 on MW is analyzed, the unchanged maximum amount of P-SW0 under lower voltage operation may lead to severe MW degradation (47.1% @ 2V). It is concluded that longer pulse width is required for write operation than read operation, and with further proposed asymmetric operation scheme with longer write pulses, significant MW improvement is achieved, largely alleviating the MW reduction issue caused by extra switching P-SW0 .
引用
收藏
页码:20 / 23
页数:4
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