A 220 GHz superconducting titanium transition edge sensor array developed for cosmic microwave background experiments

被引：4

作者：

Luo, Qianghui ^{[1
,2
]}

Zhong, Jiaqiang ^{[1
]}

Miao, Wei ^{[1
]}

Li, Feiming ^{[1
,2
]}

Wang, Qingcheng ^{[1
,2
]}

Ding, Jiangqiao ^{[1
,3
]}

Wu, Feng ^{[1
]}

Wang, Zheng ^{[1
]}

Zhou, Kangmin ^{[1
]}

Ren, Yuan ^{[1
]}

Zhang, Wen ^{[1
]}

Li, Jing ^{[1
]}

Shi, Shengcai ^{[1
]}

机构：

[1] Chinese Acad Sci, Purple Mt Observ, Nanjing 210033, Peoples R China

[2] Univ Sci & Technol China, Hefei 230026, Peoples R China

[3] Nanjing Univ Informat Sci Technol, Nanjing 210044, Peoples R China

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2023年 / 36卷 / 11期

基金：

中国国家自然科学基金;

关键词：

cosmic microwave background; superconducting transition edge sensor array; thermal conductance; complex impedance; noise equivalent power; PRIMORDIAL GRAVITATIONAL-WAVES; GRAVITY-WAVES; SILICON; POLARIZATION; BOLOMETER; GAS;

D O I：

10.1088/1361-6668/acf73b

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, we report on the design, fabrication, and characterization of a 220 GHz superconducting transition edge sensor (TES) array developed for ground-based cosmic microwave background (CMB) experiments. Unlike conventional TES arrays adopting thermometers made of bilayer superconducting films, the TES array has thermometers made of simpler single-layer titanium (Ti) film deposited on a suspended silicon nitride (SiN x ) membrane. The thermal weak link is realized by releasing the TES's thermal island including the Ti thermometer by dry etching with xenon difluoride (XeF2), giving a typical thermal conductance of 25 pW K-1. Its thermal-conductance mechanism is further studied by fitting the measured TES's complex impedance with a three-block thermal model. The dark and optical noise equivalent power (NEP) of a superconducting TES are both measured. Despite existing lens reflection and dielectric loss in the superconducting microstrip line, its typical optical NEP reaches 100 aW Hz-0.5, which meets the sensitivity requirement for ground-based CMB experiments.

引用

页数：9

共 40 条

[1] ANTENNA-COUPLED TES BOLOMETERS USED IN BICEP2, Keck Array, AND SPIDER [J].

Ade, P. A. R. ;

Aikin, R. W. ;

Amiri, M. ;

Barkats, D. ;

Benton, S. J. ;

Bischoff, C. A. ;

Bock, J. J. ;

Bonetti, J. A. ;

Brevik, J. A. ;

Buder, I. ;

Bullock, E. ;

Chattopadhyay, G. ;

Davis, G. ;

Day, P. K. ;

Dowell, C. D. ;

Duband, L. ;

Filippini, J. P. ;

Fliescher, S. ;

Golwala, S. R. ;

Halpern, M. ;

Hasselfield, M. ;

Hildebrandt, S. R. ;

Hilton, G. C. ;

Hristov, V. ;

Hui, H. ;

Irwin, K. D. ;

Jones, W. C. ;

Karkare, K. S. ;

Kaufman, J. P. ;

Keating, B. G. ;

Kefeli, S. ;

Kernasovskiy, S. A. ;

Kovac, J. M. ;

Kuo, C. L. ;

Leduc, H. G. ;

Leitch, E. M. ;

Llombart, N. ;

Lueker, M. ;

Mason, P. ;

Megerian, K. ;

Moncelsi, L. ;

Netterfield, C. B. ;

Nguyen, H. T. ;

O'Brient, R. ;

Ogburn, R. W. ;

Orlando, A. ;

Pryke, C. ;

Rahlin, A. S. ;

Reintsema, C. D. ;

Richter, S. .

ASTROPHYSICAL JOURNAL, 2015, 812 (02)

[2] SPT-3G: A Multichroic Receiver for the South Pole Telescope [J].

Anderson, A. J. ;

Ade, P. A. R. ;

Ahmed, Z. ;

Austermann, J. E. ;

Avva, J. S. ;

Barry, P. S. ;

Thakur, R. Basu ;

Bender, A. N. ;

Benson, B. A. ;

Bleem, L. E. ;

Byrum, K. ;

Carlstrom, J. E. ;

Carter, F. W. ;

Cecil, T. ;

Chang, C. L. ;

Cho, H. M. ;

Cliche, J. F. ;

Crawford, T. M. ;

Cukierman, A. ;

Denison, E. V. ;

de Haan, T. ;

Ding, J. ;

Dobbs, M. A. ;

Dutcher, D. ;

Everett, W. ;

Foster, A. ;

Gannon, R. N. ;

Gilbert, A. ;

Groh, J. C. ;

Halverson, N. W. ;

Harke-Hosemann, A. H. ;

Harrington, N. L. ;

Henning, J. W. ;

Hilton, G. C. ;

Holder, G. P. ;

Holzapfel, W. L. ;

Huang, N. ;

Irwin, K. D. ;

Jeong, O. B. ;

Jonas, M. ;

Khaire, T. ;

Knox, L. ;

Kofman, A. M. ;

Korman, M. ;

Kubik, D. ;

Kuhlmann, S. ;

Kuklev, N. ;

Kuo, C. L. ;

Lee, A. T. ;

Leitch, E. M. .

JOURNAL OF LOW TEMPERATURE PHYSICS, 2018, 193 (5-6) :1057-1065

[3] The bolometric focal plane array of the POLARBEAR CMB experiment [J].

Arnold, K. ;

Ade, P. A. R. ;

Anthony, A. E. ;

Barron, D. ;

Boettger, D. ;

Borrill, J. ;

Chapman, S. ;

Chinone, Y. ;

Dobbs, M. A. ;

Errard, J. ;

Fabbian, G. ;

Flanigan, D. ;

Fuller, G. ;

Ghribi, A. ;

Grainger, W. ;

Halverson, N. ;

Hasegawa, M. ;

Hattori, K. ;

Hazumi, M. ;

Holzapfel, W. L. ;

Howard, J. ;

Hyland, P. ;

Jaffe, A. ;

Keating, B. ;

Kermish, Z. ;

Kisner, T. ;

Le Jeune, M. ;

Lee, A. T. ;

Linder, E. ;

Lungu, M. ;

Matsuda, F. ;

Matsumura, T. ;

Miller, N. J. ;

Meng, X. ;

Morii, H. ;

Moyerman, S. ;

Myers, M. J. ;

Nishino, H. ;

Paar, H. ;

Quealy, E. ;

Reichardt, C. ;

Richards, P. L. ;

Ross, C. ;

Shimizu, A. ;

Shimmin, C. ;

Shimon, M. ;

Sholl, M. ;

Siritanasak, P. ;

Spieler, H. ;

Stebor, N. .

MILLIMETER, SUBMILLIMETER, AND FAR-INFRARED DETECTORS AND INSTRUMENTATION FOR ASTRONOMY VI, 2012, 8452

[4] SEPARATION OF FOREGROUND RADIATION FROM COSMIC MICROWAVE BACKGROUND ANISOTROPY USING MULTIFREQUENCY MEASUREMENTS [J].

BRANDT, WN ;

LAWRENCE, CR ;

READHEAD, ACS ;

PAKIANATHAN, JN ;

FIOLA, TM .

ASTROPHYSICAL JOURNAL, 1994, 424 (01) :1-21

[5]

Chang FI, 1995, P SOC PHOTO-OPT INS, V2641, P117, DOI 10.1117/12.220933

[6] Superconducting multiplexer for arrays of transition edge sensors [J].

Chervenak, JA ;

Irwin, KD ;

Grossman, EN ;

Martinis, JM ;

Reintsema, CD ;

Huber, ME .

APPLIED PHYSICS LETTERS, 1999, 74 (26) :4043-4045

[7] DOUBLE-SLOT ANTENNAS ON EXTENDED HEMISPHERICAL AND ELLIPTIC SILICON DIELECTRIC LENSES [J].

FILIPOVIC, DF ;

GEARHART, SS ;

REBEIZ, GM .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1993, 41 (10) :1738-1749

[8] An anti-reflection coating for silicon optics at terahertz frequencies [J].

Gatesman, AJ ;

Waldman, J ;

Ji, M ;

Musante, C ;

Yngvesson, S .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 2000, 10 (07) :264-266

[9] A six-degree-of-freedom micro-vibration acoustic isolator for low-temperature radiation detectors based on superconducting transition-edge sensors [J].

Gottardi, L. ;

van Weers, H. ;

Dercksen, J. ;

Akamatsu, H. ;

Bruijn, M. P. ;

Gao, J. R. ;

Jackson, B. ;

Khosropanah, P. ;

van der Kuur, J. ;

Ravensberg, K. ;

Ridder, M. L. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (05)

[10] BICEP3 performance overview and planned Keck Array upgrade [J].

Grayson, J. A. ;

Ade, P. A. R. ;

Ahmed, Z. ;

Alexander, K. D. ;

Amiri, M. ;

Barkats, D. ;

Benton, S. J. ;

Bischoff, C. A. ;

Bock, J. J. ;

Boenish, H. ;

Bowens-Rubin, R. ;

Buder, I. ;

Bullock, E. ;

Buza, V. ;

Connors, J. ;

Filippini, J. P. ;

Fliescher, S. ;

Halpern, M. ;

Harrison, S. ;

Hilton, G. C. ;

Hristov, V. V. ;

Hui, H. ;

Irwin, K. D. ;

Kang, J. ;

Karkare, K. S. ;

Karpel, E. ;

Kefeli, S. ;

Kernasovskiy, S. A. ;

Kovac, J. M. ;

Kuo, C. L. ;

Leitch, E. M. ;

Lueker, M. ;

Megerian, K. G. ;

Monticue, V. ;

Namikawa, T. ;

Netterfield, C. B. ;

Nguyen, H. T. ;

O'Brient, R. ;

Ogburn, R. W. ;

Pryke, C. ;

Reintsema, C. D. ;

Richter, S. ;

Schwarz, R. ;

Sorensen, C. ;

Sheehy, C. D. ;

Staniszewski, Z. K. ;

Steinbach, B. ;

Teply, G. P. ;

Thompson, K. L. ;

Tolan, J. E. .

MILLIMETER, SUBMILLIMETER, AND FAR-INFRARED DETECTORS AND INSTRUMENTATION FOR ASTRONOMY VIII, 2016, 9914

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