Advanced Epitaxial Lift-Off and Transfer Procedure for the Fabrication of High-Quality Functional Oxide Membranes

被引:10
作者
Bouaziz, Jordan [1 ]
Cancellieri, Claudia [1 ]
Rheingans, Bastian [1 ]
Jeurgens, Lars P. H. [1 ]
La Mattina, Fabio [1 ]
机构
[1] Swiss Fed Labs Mat Sci & Technol, Empa, Uberlandstr 129, CH-8600 Dubendorf, Switzerland
关键词
epitaxial films; flexible electronics; functional oxides; membranes; perovskite oxides; THIN-FILMS; MECHANICAL-PROPERTIES; RETENTION; GRAPHENE; SR3AL2O6; GROWTH; LAYER;
D O I
10.1002/admi.202201458
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In the past 5 years, the transfer of epitaxial oxide thin films has drawn a renewed interest in the scientific community. The major challenge in this technology is to minimize the appearance of extended bulk defects such as plastic deformations, cracks, and delamination, which are induced by the transfer process to a new host substrate. In this work, a procedure for the transfer of epitaxial oxide films where a rigid bond to the final host holder is obtained via a metallic Au/Ag bonding layer is presented. Here, the transfer of SrRuO3 (SRO) and SrRuO3/SrTiO3 (STO) epitaxial films grown on a water-soluble Sr3Al2O6 sacrificial layer is reported. These epitaxial films are grown on a STO substrate and transferred onto a Si host substrate. Roughness values lower than 1nm are observed for the transferred SRO membranes. Cross-section analysis shows straight interfaces without plastic deformation of the membranes. X-ray diffraction rocking-curve analysis evidences that mechanical damage is minimized and the membranes remain close to their initial quality. This procedure represents an important step forward in the development of advanced technologies for membrane transfer of epitaxial oxides and superstructures.
引用
收藏
页数:10
相关论文
共 63 条
[21]   Extreme tensile strain states in La0.7Ca0.3MnO3 membranes [J].
Hong, Seung Sae ;
Gu, Mingqiang ;
Verma, Manish ;
Harbola, Varun ;
Wang, Bai Yang ;
Lu, Di ;
Vailionis, Arturas ;
Hikita, Yasuyuki ;
Pentcheva, Rossitza ;
Rondinelli, James M. ;
Hwang, Harold Y. .
SCIENCE, 2020, 368 (6486) :71-+
[22]   Two-dimensional limit of crystalline order in perovskite membrane films [J].
Hong, Seung Sae ;
Yu, Jung Ho ;
Lu, Di ;
Marshall, Ann F. ;
Hikita, Yasuyuki ;
Cui, Yi ;
Hwang, Harold Y. .
SCIENCE ADVANCES, 2017, 3 (11)
[23]   Strain-controlled electrical and magnetic properties of SrRuO3 thin films with Sr3Al2O6 buffer layers [J].
Hu, Chuan-Zhu ;
Zhang, You-Shan ;
Niu, Xu ;
Zhong, Ni ;
Xiang, Ping-Hua ;
Duan, Chun-Gang .
APPLIED PHYSICS LETTERS, 2021, 118 (07)
[24]   Freestanding crystalline oxide perovskites down to the monolayer limit [J].
Ji, Dianxiang ;
Cai, Songhua ;
Paudel, Tula R. ;
Sun, Haoying ;
Zhang, Chunchen ;
Han, Lu ;
Wei, Yifan ;
Zang, Yipeng ;
Gu, Min ;
Zhang, Yi ;
Gao, Wenpei ;
Huyan, Huaixun ;
Guo, Wei ;
Wu, Di ;
Gu, Zhengbin ;
Tsymbal, Evgeny Y. ;
Wang, Peng ;
Nie, Yuefeng ;
Pan, Xiaoqing .
NATURE, 2019, 570 (7759) :87-+
[25]   Super-Flexible Freestanding BiMnO3 Membranes with Stable Ferroelectricity and Ferromagnetism [J].
Jin, Cai ;
Zhu, Yuanmin ;
Li, Xiaowen ;
An, Feng ;
Han, Wenqiao ;
Liu, Qi ;
Hu, Sixia ;
Ji, Yanjiang ;
Xu, Zedong ;
Hu, Songbai ;
Ye, Mao ;
Zhong, Gaokuo ;
Gu, Meng ;
Chen, Lang .
ADVANCED SCIENCE, 2021, 8 (24)
[26]   Strain-Mediated High Conductivity in Ultrathin Antiferromagnetic Metallic Nitrides [J].
Jin, Qiao ;
Cheng, Hu ;
Wang, Zhiwen ;
Zhang, Qinghua ;
Lin, Shan ;
Roldan, Manuel A. ;
Zhao, Jiali ;
Wang, Jia-Ou ;
Chen, Shuang ;
He, Meng ;
Ge, Chen ;
Wang, Can ;
Lu, Hui-Bin ;
Guo, Haizhong ;
Gu, Lin ;
Tong, Xin ;
Zhu, Tao ;
Wang, Shanmin ;
Yang, Hongxin ;
Jin, Kui-juan ;
Guo, Er-Jia .
ADVANCED MATERIALS, 2021, 33 (02)
[27]   X-ray diffraction peaks due to misfit dislocations in heteroepitaxial structures [J].
Kaganer, VM ;
Kohler, R ;
Schmidbauer, M ;
Opitz, R ;
Jenichen, B .
PHYSICAL REVIEW B, 1997, 55 (03) :1793-1810
[28]  
Koster G., 2015, EPITAXIAL GROWTH COM
[29]   Structure, physical properties, and applications of SrRuO3 thin films [J].
Koster, Gertjan ;
Klein, Lior ;
Siemons, Wolter ;
Rijnders, Guus ;
Dodge, J. Steven ;
Eom, Chang-Beom ;
Blank, Dave H. A. ;
Beasley, Malcolm R. .
REVIEWS OF MODERN PHYSICS, 2012, 84 (01) :253-298
[30]   Epitaxial growth and layer-transfer techniques for heterogeneous integration of materials for electronic and photonic devices [J].
Kum, Hyun ;
Lee, Doeon ;
Kong, Wei ;
Kim, Hyunseok ;
Park, Yongmo ;
Kim, Yunjo ;
Baek, Yongmin ;
Bae, Sang-Hoon ;
Lee, Kyusang ;
Kim, Jeehwan .
NATURE ELECTRONICS, 2019, 2 (10) :439-450