A MINIATURIZED TRANSIT-TIME ULTRASONIC FLOWMETER USING PMUTS FOR LOW-FLOW MEASUREMENT IN SMALL-DIAMETER CHANNELS

被引：2

作者：

Gao, Yunfei ^{[1
,2
]}

Wu, Zhipeng ^{[2
]}

Chen, Minkan ^{[2
]}

Lou, Liang ^{[1
,2
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai, Peoples R China

[2] Shanghai Ind mu Technol Res Inst, Shanghai, Peoples R China

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Aluminum nitride (AlN); PMUTs; Transit-time ultrasonic flowmeter (TTUF); Small-diameter;

D O I：

10.1109/MEMS49605.2023.10052185

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report a miniaturized transit-time ultrasonic flowmeter (TTUF) for low-flow measurement in small-diameter channels. The proposed TTUF contains two pieces of ScAlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) and a pi-type channel. The PMUTs contain 169 (13 x 13) square cells with the dimension of 2.8 x 2.8 mm(2), showing good transmitting sensitivity and receiving sensitivity at frequency of 1MHz in water. Experiment results show that the developed TTUF provides a wide range of flow measurements from 2 to 300 L/h with 1 % repeatability in the channel of 4 mm diameter, which is smaller than most of the reported ones.

引用

页码：115 / 118

页数：4

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