Large-Scale β-Ga2O3 Trench MOS-Type Schottky Barrier Diodes with 1.02 Ideality Factor and 0.72 V Turn-On Voltage

beta-Ga2O3 Schottky barrier diodes (SBDs) suffer from the electric field crowding and barrier height lowering effect, resulting in a low breakdown voltage (BV) and high reverse leakage current. Here, we developed beta-Ga2O3 trench MOS-type Schottky barrier diodes (TMSBDs) on beta-Ga2O3 single-crystal substrates with halide vapor phase epitaxial layers based on ultraviolet lithography and dry etching. The 1/C2-Vplots are deflected at 2.24 V, which is caused by the complete depletion in the mesa region of the TMSBDs. A close-to-unity ideality factor of 1.02 and a low turn-on voltage of 0.72 V are obtained. This is due to the low interface trap density in the metal/semiconductor interface of TMSBDs, as confirmed by the current-voltage ( (I-V) hysteresis measurements. The specific on-resistance calculated with the actual Schottky contact area increases as the area ratio (AR) increases because of the current spreading phenomenon. Furthermore, the reverse leakage current of the TMSBDs is smaller and the BV is increased by 120 V compared with the regular SBD. This work paves the way for further improving the overall performance of beta-Ga2O3 TMSBDs.