[1] Harbin Inst Technol, MEMS Ctr, Harbin, Peoples R China
[2] Shanghai Inst Space Power Sources, State Key Lab Space Power Sources Technol, Shanghai, Peoples R China
[3] Harbin Inst Technol, Natl Key Lab Sci & Technol Adv Composites Special, Harbin, Peoples R China
[4] Beihang Univ, Sch Mech Engn & Automat, Beijing, Peoples R China
[5] Harbin Inst Technol, MEMS Ctr, Harbin 150001, Peoples R China
[6] Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R China