Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer

被引：4

作者：

Hwang, Gukhyeon ^{[1
]}

Choi, Inho ^{[1
]}

Choi, Sukhyun ^{[1
]}

Kheiryzadehkhanghah, Saeid ^{[1
]}

Chegal, Won ^{[2
,3
]}

Kim, Sundtae ^{[4
]}

Kim, Sangjun ^{[1
,4
]}

Magnusson, Robert ^{[2
,5
]}

Kim, Daesuk ^{[1
]}

机构：

[1] Jeonbuk Natl Univ, Div Mech Syst Engn, Jeonju 54896, South Korea

[2] Korea Res Inst Stand & Sci, Semicond Integrated Metrol Team, 267 Gajeong Ro, Daejeon 34113, South Korea

[3] Chungnam Natl Univ, Grad Sch Analyt Sci & Technol GRAST, Daejeon 34134, South Korea

[4] Auros Technol Inc, Hwaseong 18487, South Korea

[5] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 12期

基金：

新加坡国家研究基金会;

关键词：

THICKNESS; PHASE;

D O I：

10.1364/OE.487111

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a robust dynamic spectroscopic imaging ellipsometer (DSIE) based on a monolithic Linnik-type polarizing interferometer. The Linnik-type monolithic scheme combined with an additional compensation channel solves the long-term stability problem of previous single-channel DSIE. The importance of a global mapping phase error compensation method is also addressed for accurate 3-D cubic spectroscopic ellipsometric mapping in large-scale applications. To evaluate the effectiveness of the proposed compensation method for enhancing system robustness and reliability, a whole thin film wafer mapping is conducted in a general environment where various external disturbances affect the system.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：19569 / 19587

页数：19

共 34 条

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