Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer

被引：4

作者：

Hwang, Gukhyeon ^{[1
]}

Choi, Inho ^{[1
]}

Choi, Sukhyun ^{[1
]}

Kheiryzadehkhanghah, Saeid ^{[1
]}

Chegal, Won ^{[2
,3
]}

Kim, Sundtae ^{[4
]}

Kim, Sangjun ^{[1
,4
]}

Magnusson, Robert ^{[2
,5
]}

Kim, Daesuk ^{[1
]}

机构：

[1] Jeonbuk Natl Univ, Div Mech Syst Engn, Jeonju 54896, South Korea

[2] Korea Res Inst Stand & Sci, Semicond Integrated Metrol Team, 267 Gajeong Ro, Daejeon 34113, South Korea

[3] Chungnam Natl Univ, Grad Sch Analyt Sci & Technol GRAST, Daejeon 34134, South Korea

[4] Auros Technol Inc, Hwaseong 18487, South Korea

[5] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 12期

基金：

新加坡国家研究基金会;

关键词：

THICKNESS; PHASE;

D O I：

10.1364/OE.487111

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a robust dynamic spectroscopic imaging ellipsometer (DSIE) based on a monolithic Linnik-type polarizing interferometer. The Linnik-type monolithic scheme combined with an additional compensation channel solves the long-term stability problem of previous single-channel DSIE. The importance of a global mapping phase error compensation method is also addressed for accurate 3-D cubic spectroscopic ellipsometric mapping in large-scale applications. To evaluate the effectiveness of the proposed compensation method for enhancing system robustness and reliability, a whole thin film wafer mapping is conducted in a general environment where various external disturbances affect the system.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：19569 / 19587

页数：19

共 34 条

[1] [Anonymous], 1999, NEWPORT WHITE PAPER
[2] Imaging ellipsometry: quantitative analysis
Asinovski, L.
Beaglehole, D.
Clarkson, M. T.
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2008, 205 (04): : 764 - 771
[3] Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis
Attota, Ravikiran
Germer, Thomas A.
Silver, Richard M.
[J]. OPTICS LETTERS, 2008, 33 (17) : 1990 - 1992
[4] A new spectral imaging ellipsometer for measuring the thickness of patterned thin films
Chegal, W
Cho, YJ
Kim, HJ
Cho, HM
Lee, YW
Kim, SH
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (9A): : 6475 - 6476
[5] Chipman RA, 2019, POLARIZED LIGHT AND OPTICAL SYSTEMS, P1
[6] Robustness enhancement of dynamic spectroscopic ellipsometry by compensating temperature dependency of the monolithic polarizing interferometer
Choi, Inho
Dembele, Vamara
Kheiryzadehkhanghah, Saeid
Hwang, Gukhyeon
Charron, Benjamin
Masson, Jean-Francois
Kim, Daesuk
[J]. APPLIED OPTICS, 2022, 61 (26) : 7653 - 7661
[7] Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme
Dembele, Vamara
Choi, Sukhyun
Chegal, Won
Choi, Inho
Paul, Madhan Jayakumar
Kim, Junho
Kim, Daesuk
[J]. OPTICS COMMUNICATIONS, 2020, 454
[8] Interferometric snapshot spectro-ellipsometry
Dembele, Vamara
Jin, Moonseob
Choi, Inho
Chegal, Won
Kim, Daesuk
[J]. OPTICS EXPRESS, 2018, 26 (02): : 1333 - 1341
[9] Fujiwara H., 2007, Spectroscopic Ellipsometry: Principles and Applications, DOI 10.1002/9780470060193
[10] Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure
Hlubina, Petr
Ciprian, Dalibor
Lunacek, Jiri
[J]. OPTICS LETTERS, 2009, 34 (17) : 2661 - 2663

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