Elemental distribution and fracture properties of magnetron sputtered carbon supersaturated tungsten films

被引：2

作者：

Fritze, S. ^{[1
]}

Hahn, R. ^{[2
]}

Aboulfadl, H. ^{[3
]}

Johansson, F. O. L. ^{[4
,5
,6
]}

Lindblad, R. ^{[1
]}

Boor, K. ^{[1
]}

Lindblad, A. ^{[7
]}

Berggren, E. ^{[7
]}

Kuehn, D. ^{[5
]}

Leitner, T. ^{[5
]}

Osinger, B. ^{[1
]}

Lewin, E. ^{[1
]}

Jansson, U. ^{[1
]}

Mayrhofer, P. H. ^{[2
]}

Thuvander, M. ^{[3
]}

机构：

[1] Uppsala Univ, Dept Chem Angstrom, Box 538, SE-75121 Uppsala, Sweden

[2] TU Wien, Inst Mat Sci & Technol, A-1060 Vienna, Austria

[3] Chalmers Univ Technol, Dept Phys, SE-41296 Gothenburg, Sweden

[4] KTH Royal Inst Technol, Dept Chem, Div Appl Phys Chem, SE-10044 Stockholm, Sweden

[5] Helmholtz Zentrum Berlin Mat & Energie, Inst Methods & Instrumentat Synchrotron Radiat Res, Albert Einstein Str 15, D-12489 Berlin, Germany

[6] Univ Potsdam, Inst Phys & Astron, Karl Liebknecht Str 24-25, D-14476 Potsdam, Germany

[7] Uppsala Univ, Dept Phys & Astron, Div Xray Photon Sci, Box 516, S-75120 Uppsala, Sweden

来源：

SURFACE & COATINGS TECHNOLOGY | 2024年 / 477卷

关键词：

PVD; Fracture toughness; Atom probe tomography; XPS; Tungsten; THIN-FILMS; MECHANICAL-BEHAVIOR; TOUGHNESS; HARDNESS;

D O I：

10.1016/j.surfcoat.2023.130326

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The combination of strength and toughness is a major driving force for alloy design of protective coatings, and nanocrystalline tungsten (W)-alloys have shown to be promising candidates for combining strength and toughness. Here we investigate the elemental distribution and the fracture toughness of carbon (C) alloyed W thin films prepared by non-reactive magnetron sputtering. W:C films with up to -4 at.% C crystallize in a bodycentered-cubic structure with a strong hh0texture, and no additional carbide phases are observed in the diffraction pattern. Atom probe tomography and X-ray photoelectron spectroscopy confirmed the formation of such a supersaturated solid solution. The pure W film has a hardness -13 GPa and the W:C films exhibit a peak hardness of -24 GPa. In-situ micromechanical cantilever bending tests show that the fracture toughness decreases from -4.5 MPa center dot m1/2 for the W film to -3.1 MPa center dot m1/2 for W:C films. The results show that C can significantly enhance the hardness of W thin films while retaining a high fracture toughness.

引用

页数：7

共 39 条

[1] An energy-dispersive VUV bearaline for NEXAFS and other CFS/CIS studies [J].