One-Dimensional High-Resolution Wavefront Sensor Enabled by Subwavelength Compound Gratings

被引：1

作者：

Meng, Yunlong ^{[1
]}

Shen, Xinyu ^{[1
]}

Xie, Junyang ^{[1
]}

Peng, Yao ^{[1
]}

Shao, Xiaowen ^{[1
]}

Yan, Feng ^{[1
]}

Yang, Cheng ^{[1
]}

机构：

[1] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210023, Peoples R China

来源：

PHOTONICS | 2023年 / 10卷 / 04期

关键词：

wavefront; angle sensor; compound gratings; PHASE RETRIEVAL; ZERNIKE POLYNOMIALS; DIFFRACTION; TRANSPORT; IMAGE; ABERRATIONS; MICROSCOPY; ALGORITHM;

D O I：

10.3390/photonics10040420

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Angle sensors are widely used for wavefront measurements, which is attributed to their integration and robustness. Currently, commercial sensors are available with pixel sizes in the order of wavelengths. However, the spatial resolution of angle sensors still lags far behind. Here, we report a one-dimensional, high-resolution wavefront sensor. It was produced by introducing subwavelength compound gratings above the pixels. The gratings involved could be replaced by the sensor's intrinsic readout circuitry without additional operation. The experimental results showed that it had a spatial resolution of 1.4 mu m, two orders of magnitude higher than that of the Shack-Hartmann wavefront sensor. The significant increase in spatial resolution enables angle sensors to reconstruct complex wavefronts accurately.

引用

页数：13

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