X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines

被引：2

作者：

Zaluzec, Nestor J. ^{[1
]}

机构：

[1] Argonne Natl Lab, Photon Sci Directorate, Lemont, IL 60439 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2023年 / 29卷 / 01期

关键词：

aberration correction; AEM; EELS; TEM/STEM; XEDS; HIGH-RESOLUTION; MICROSCOPE; DETECTORS; SYSTEM;

D O I：

10.1017/S143192762200068X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.

引用

页码：334 / 340

页数：7

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