X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines

被引：2
|
作者：
Zaluzec, Nestor J. [1 ]
机构：
[1] Argonne Natl Lab, Photon Sci Directorate, Lemont, IL 60439 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2023年 / 29卷 / 01期
关键词：
aberration correction; AEM; EELS; TEM/STEM; XEDS; HIGH-RESOLUTION; MICROSCOPE; DETECTORS; SYSTEM;
D O I：
10.1017/S143192762200068X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.
引用
收藏
页码：334 / 340
页数：7
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