An Indium-Gallium-Zinc-Oxide Layer Decorated With Gold Nanoparticles for Ultrahigh Sensitive Formaldehyde Gas Detection

被引:4
作者
Niu, Jing-Shiuan [1 ]
Chen, Po-Lin [1 ]
Lin, Kun-Wei [2 ]
Tsai, Jung-Hui [3 ]
Hsu, Wei-Chou [4 ]
Liu, Wen-Chau [4 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
[2] Chaoyang Univ Technol, Dept Comp Sci & Informat Engn, Taichung 41349, Taiwan
[3] Natl Kaohsiung Normal Univ, Dept Elect Engn, Kaohsiung 802, Taiwan
[4] Natl Cheng Kung Univ, Inst Microelect, Acad Innovat Semicond & Sustainable Mfg, Dept Elect Engn, Tainan 70101, Taiwan
关键词
Formaldehyde (HCHO); GM(1,1); indium- gallium-zinc-oxide (IGZO); nanoparticles (NPs); sensing response; specific surface area; SENSING CHARACTERISTICS; SELECTIVE DETECTION; SENSOR; HUMIDITY;
D O I
10.1109/TED.2022.3223326
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
interesting formaldehyde (HCHO) gas sensor is fabricated using a sputtered indium-gallium-zinc- oxide (IGZO) layer decorated with gold (Au) nanoparticles (NPs). Based on the use of Au NPs, the efficiently increased surface area to volume (SA/V) ratio and catalytic reactivity cause the effective enhancement of HCHO gas sensing performance. Experimentally, under 20 ppm HCHO gas, an ultrahigh sensing response of 6855 with a response (recovery) time of 30 s (13 s) is obtained for the fabricated Au NP/IGZO sensor at 225 degrees C. A lower detectable content of 200 ppb HCHO/air gas at 225 degrees C is achieved. Furthermore, an improved GM(1, 1) model is used to enhance the prediction ability and meliorate data transmission efficiency within the acceptable reduction error range. This algorithm uses preprocessing to find the starting point of a sensing response and evaluate the influence of noise. This algorithm can efficiently improve the transmission efficiency without increasing the computational complexity. The studied device also displays the advantages of a simple structure, cost-effective production, and suitable application in the internet of things (IoT).
引用
收藏
页码:269 / 274
页数:6
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