[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, Beijing 100081, Peoples R China
[2] Yangtze Delta Reg Acad Beijing Inst Technol, Jiaxing 314019, Peoples R China
[3] Beijing Inst Technol Chongqing Innovat Ctr, Chongqing 401120, Peoples R China
[4] Beijing Inst Technol, Sch Mech Engn, Beijing 100081, Peoples R China