All-Transfer Electrode Interface Engineering Toward Harsh-Environment-Resistant MoS2 Field-Effect Transistors

被引:16
作者
Wu, Yonghuang [1 ]
Xin, Zeqin [1 ]
Zhang, Zhibin [2 ]
Wang, Bolun [1 ]
Peng, Ruixuan [1 ]
Wang, Enze [1 ]
Shi, Run [1 ]
Liu, Yiqun [1 ]
Guo, Jing [1 ]
Liu, Kaihui [1 ]
Liu, Kai [2 ]
机构
[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Peking Univ, Sch Phys, Frontiers Sci Ctr Nanooptoelect, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
field-effect transistors; harsh-environment resistance; interface engineering; molybdenum disulfide; van der Waals electrodes; 2-DIMENSIONAL MATERIALS; CONTACT; GRAPHENE; TITANIUM; RELIABILITY; TECHNOLOGY; STABILITY; SILICON; GROWTH; XPS;
D O I
10.1002/adma.202210735
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanoscale electronic devices that can work in harsh environments are in high demand for wearable, automotive, and aerospace electronics. Clean and defect-free interfaces are of vital importance for building nanoscale harsh-environment-resistant devices. However, current nanoscale devices are subject to failure in these environments, especially at defective electrode-channel interfaces. Here, harsh-environment-resistant MoS2 transistors are developed by engineering electrode-channel interfaces with an all-transfer of van der Waals electrodes. The delivered defect-free, graphene-buffered electrodes keep the electrode-channel interfaces intact and robust. As a result, the as-fabricated MoS2 devices have reduced Schottky barrier heights, leading to a very large on-state current and high carrier mobility. More importantly, the defect-free, hydrophobic graphene buffer layer prevents metal diffusion from the electrodes to MoS2 and the intercalation of water molecules at the electrode-MoS2 interfaces. This enables high resistances of MoS2 devices with all-transfer electrodes to various harsh environments, including humid, oxidizing, and high-temperature environments, surpassing the devices with other kinds of electrodes. The work deepens the understanding of the roles of electrode-channel interfaces in nanoscale devices and provides a promising interface engineering strategy to build nanoscale harsh-environment-resistant devices.
引用
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页数:10
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