Efficient 3-D Finite Element Modeling of Periodic XBAR Resonators

被引：1

作者：

Li, Hongliang ^{[1
]}

Koskela, Julius ^{[1
]}

Massey, Jackson W. ^{[1
]}

Willemsen, Balam ^{[1
]}

Jin, Jian-Ming ^{[2
]}

机构：

[1] Resonant Inc, San Mateo, CA 94402 USA

[2] Univ Illinois, Ctr Computat Electromagnet, Dept Elect & Comp Engn, Champaign, IL 61801 USA

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2023年 / 70卷 / 07期

关键词：

Acoustic wave (AW) resonators; domain decomposition method (DDM); efficient numerical modeling; finite element method (FEM); finite element tearing and interconnecting (FETI); DOMAIN DECOMPOSITION METHOD; PERFECTLY MATCHED LAYER; 2-LEVEL FETI METHOD; PARALLEL IMPLEMENTATION; LITHIUM-NIOBATE; SCHWARZ METHODS; PART I; ALGORITHMS; ABSORPTION; SIMULATION;

D O I：

10.1109/TUFFC.2023.3277342

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

An efficient technique is presented for 3-D finite element modeling of large-scale periodic excited bulk acoustic resonator (XBAR) resonators in the time-harmonic domain. In this technique, a domain decomposition scheme is used to decompose the computational domain into many small subdomains whose FE subsystems can be factorized with a direct sparse solver at a low cost. Transmission conditions (TCs) are enforced to interconnect adjacent subdomains, and a global interface system is formulated and solved iteratively. To accelerate the convergence, a second-order TC (SOTC) is designed to make the subdomain interfaces transparent for propagating and evanescent waves. An effective forward-backward preconditioner is constructed that when combined with the SOTC significantly reduce the number of iterations at no additional cost. Numerical results are given to demonstrate the accuracy, efficiency, and capability of the proposed algorithm.

引用

页码：759 / 771

页数：13

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