Extraction Technique for the Conduction Band Minimum Energy in Amorphous Indium-Gallium-Zinc-Oxide Thin Film Transistors
被引:3
作者:
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Kim, Haesung
[1
]
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Yoo, Han Bin
[1
]
Lee, Heesung
论文数: 0引用数: 0
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机构:
SEC, Memory Business, DRAM PA Team, DRAM Prod & Technol, Pyeongtaek 17786, Gyeonggi, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Lee, Heesung
[2
]
Ryu, Ji Hee
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Ryu, Ji Hee
[1
]
Park, Ju Young
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Park, Ju Young
[1
]
Han, Seung Hyeop
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Han, Seung Hyeop
[1
]
Yang, Hyojin
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Yang, Hyojin
[1
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Bae, Jong-Ho
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Bae, Jong-Ho
[1
]
Choi, Sung-Jin
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Choi, Sung-Jin
[1
]
Kim, Dae Hwan
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Kim, Dae Hwan
[1
]
Kim, Dong Myong
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Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Kim, Dong Myong
[1
]
机构:
[1] Kookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
[2] SEC, Memory Business, DRAM PA Team, DRAM Prod & Technol, Pyeongtaek 17786, Gyeonggi, South Korea
Thin film transistors;
Logic gates;
Optimized production technology;
Threshold voltage;
Substrates;
Random access memory;
Indium;
Amorphous oxide semiconductor-based thin film transistors (AOS TFTS);
amorphous indium-gallium-zinc-oxide (a-IGZO)-TFTS;
conduction band minimum energy;
extraction technique;
mobility edge;
SUBGAP DOS;
CAPACITANCE;
STATES;
D O I:
10.1109/TED.2023.3269735
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The conduction band minimum energy in amorphous oxide semiconductor-based thin film transistors (AOS TFTs) is a key parameter governing the accurate extraction of energy distribution for the subgap density-of states (DOSs) and carrier mobility. We report a technique for extraction of the gate voltage (V-CBM) and corresponding energy (E-F,E-CBM = EC-EREF) for the quasi-Fermi level (E-F) equal to the conduction band minimum (E-C) as V-CBM = V-GS (E-F = E-C) and E-F,E-CBM = E-F (V-GS = V-CBM). In order to confirm this technique through optoelectronic experimental data, amorphous indium-gallium-zinc-oxide (a-IGZO)based thin film transistor was irradiated with various wavelengths and power, and obtained V-CBM = 7.1 V and E-F CBM = 71 meV in the dark state. This technique is expected to be useful in the accurate characterization of the subgap DOS and the effective mobility in AOS TFTs through a simple and effective extraction process.
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Chen, Weifeng
Wu, Weijing
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South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Wu, Weijing
Zhou, Lei
论文数: 0引用数: 0
h-index: 0
机构:
Guangzhou New Vis Optoelect Technol Co Ltd, Guangzhou 510530, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Zhou, Lei
Xu, Miao
论文数: 0引用数: 0
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机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Xu, Miao
Wang, Lei
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机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Wang, Lei
Ning, Honglong
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机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Ning, Honglong
Peng, Junbiao
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South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Chen, Weifeng
Wu, Weijing
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Wu, Weijing
Zhou, Lei
论文数: 0引用数: 0
h-index: 0
机构:
Guangzhou New Vis Optoelect Technol Co Ltd, Guangzhou 510530, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Zhou, Lei
Xu, Miao
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Xu, Miao
Wang, Lei
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Wang, Lei
Ning, Honglong
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China
Ning, Honglong
Peng, Junbiao
论文数: 0引用数: 0
h-index: 0
机构:
South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R ChinaSouth China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Guangdong, Peoples R China