Rapid Cu-Cu bonding by pressure-sintering of anti-oxidized Cu nanoparticle pastes under ambient atmosphere

被引:4
作者
Yuan, Yulei [1 ,2 ]
Zhang, Minghui [1 ,3 ]
Li, Junjie [1 ,4 ]
Liu, Zhi-Quan [1 ]
机构
[1] Chinese Acad Sci, Shenzhen Inst Adv Elect Mat, Shenzhen Inst Adv Technol, Shenzhen 518100, Peoples R China
[2] Univ Sci & Technol China, Nano Sci & Technol Inst, Suzhou 215127, Peoples R China
[3] Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China
[4] Jian Hotchain Technol Co Ltd, Jian 343900, Peoples R China
基金
中国国家自然科学基金;
关键词
POWER SEMICONDUCTOR; PARTICLE PASTE; DIE ATTACH; JOINTS; PERFORMANCE;
D O I
10.1007/s10854-023-11095-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The application of wide bandgap semiconductor devices requires high-performance interconnect materials which have high thermal conductivity and high-temperature resistance. Among which, Cu nanoparticle paste sintering technology is regarded as an advanced alternative. However, Cu nanoparticles are easy to be oxidized, which needs an inert or vacuum atmosphere during the sintering process that restrict the practical application of Cu sintering technology. In this paper, a new type of Cu nanoparticle paste with antioxidation property was prepared by mixed commercial Cu nanoparticles (average diameter: 100 nm) treated by formic acid and reducing solvents containing 1-dodecanethiol. Based on the Cu nanoparticle paste, the pressure-assisted bonding at different bonding temperatures and times was carried out without using any protective atmosphere. A remarkable high shear strength of 55.06 MPa for Cu-Cu joints formed by sintering of Cu nanoparticle paste was achieved when sintered at 250 & DEG;C. The results of bonding experiment suggest that the proposed Cu nanoparticle paste has excellent antioxidation property and shows great application potential in high power electronic packaging.
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页数:10
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