Recent Progress in III-V Photodetectors Grown on Silicon

被引:13
|
作者
Zeng, Cong [1 ]
Fu, Donghui [1 ]
Jin, Yunjiang [1 ]
Han, Yu [1 ]
机构
[1] Sun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China
基金
中国国家自然科学基金;
关键词
Si photonics; III-V photodetector; blanket heteroepitaxy; selective heteroepitaxy; QUANTUM-DOT LASERS; LOW DARK CURRENT; SEMICONDUCTOR-METAL PHOTODETECTORS; MOLECULAR-BEAM EPITAXY; HIGH-SPEED; AVALANCHE PHOTODIODES; ON-CHIP; SI; PERFORMANCE; GAAS;
D O I
10.3390/photonics10050573
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An efficient photodetector (PD) is a key component in silicon-based photonic integrated circuits (PICs). III-V PDs with low dark current density, large bandwidth, and wide operation wavelength range have become increasingly important for Si photonics in various applications. Monolithic integration of III-V PDs on Si by direct heteroepitaxy exhibits the lowest cost, the largest integration density, and the highest throughput. As the research of integrating III-V lasers on Si flourishes in the last decade, various types of III-V PDs on Si with different device structures and absorption materials have also been developed. While the integration of III-V lasers on Si using various technologies has been systematically reviewed, there are few reviews of integrating III-V PDs on Si. In this article, we review the most recent advances in III-V PDs directly grown on Si using two different epitaxial techniques: blanket heteroepitaxy and selective heteroepitaxy.
引用
收藏
页数:26
相关论文
共 50 条
  • [21] Physical Properties and Characteristics of III-V Lasers on Silicon
    Read, Graham William
    Marko, Igor Pavlovich
    Hossain, Nadir
    Sweeney, Stephen John
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2015, 21 (06) : 377 - 384
  • [22] Effect of rapid thermal annealing on threading dislocation density in III-V epilayers monolithically grown on silicon
    Li, W.
    Chen, S.
    Tang, M.
    Wu, J.
    Hogg, R.
    Seeds, A.
    Liu, H.
    Ross, I.
    JOURNAL OF APPLIED PHYSICS, 2018, 123 (21)
  • [23] III-V Lasers epitaxially grown on Si
    Tournie, Eric
    30TH ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2017, : 401 - 401
  • [24] High-performance III-V photodetectors on a monolithic InP/SOI platform
    Xue, Ying
    Han, Yu
    Tong, Yeyu
    Yan, Zhao
    Wang, Yi
    Zhang, Zunyue
    Tsang, Hon Ki
    Lau, Kei May
    OPTICA, 2021, 8 (09) : 1204 - 1209
  • [25] Progressing in III-V Semiconductor Quantum Dot Lasers Grown Directly on Silicon: A Review
    Hussin, Rehab Joko
    Karomi, Ivan B.
    SILICON, 2024, 16 (15) : 5457 - 5470
  • [26] Recent progress and surface-related key issues in III-V semiconductor nanoelectronics
    Hasegawa, Hideki
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 50 (03) : 543 - 551
  • [27] Ultrafast Surface Plasmon III-V Photodetectors Based on Nanomonopoles
    Mousavi, Saba Siadat
    Stoehr, Andreas
    Berini, Pierre
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2016, 34 (20) : 4682 - 4687
  • [28] Heterogeneously Integrated III-V on Silicon Lasers
    Ben Bakir, B.
    Sciancalepore, C.
    Descos, A.
    Duprez, H.
    Bordel, D.
    Sanchez, L.
    Jany, C.
    Hassan, K.
    Brianceau, P.
    Carron, V.
    Menezo, S.
    SEMICONDUCTOR WAFER BONDING 13: SCIENCE, TECHNOLOGY, AND APPLICATIONS, 2014, 64 (05): : 211 - 223
  • [29] LOW-TEMPERATURE-GROWN III-V MATERIALS
    MELLOCH, MR
    WOODALL, JM
    HARMON, ES
    OTSUKA, N
    POLLAK, FH
    NOLTE, DD
    FEENSTRA, RM
    LUTZ, MA
    ANNUAL REVIEW OF MATERIALS SCIENCE, 1995, 25 : 547 - 600
  • [30] Surface dark current mechanisms in III-V infrared photodetectors [Invited]
    Marozas, B. T.
    Hughes, W. D.
    Du, X.
    Sidor, D. E.
    Savich, G. R.
    Wicks, G. W.
    OPTICAL MATERIALS EXPRESS, 2018, 8 (06): : 1419 - 1424