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High-sensitivity gas pressure sensor with low temperature cross-talk based on Vernier effect of cascaded Fabry-Perot interferometers
被引:12
作者:
Tian, Peixuan
[1
]
Guan, Chunying
[1
]
Xiong, Ziyang
[1
]
Gao, Shan
[1
]
Ye, Peng
[1
]
Yang, Jing
[1
]
He, Xuelan
[1
]
Shi, Jinhui
[1
]
Yuan, Libo
[1
]
机构:
[1] Harbin Engn Univ, Coll Phys & Optoelect Engn, Harbin 150001, Peoples R China
基金:
中国国家自然科学基金;
关键词:
Fiber sensor;
Gas pressure sensor;
Fabry-Perot interferometer;
Vernier effect;
FIBER-TIP;
CAVITY;
D O I:
10.1016/j.yofte.2022.103160
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
A gas pressure sensor composed of cascaded Fabry-Perot interferometers (FPIs) based on Vernier effect was demonstrated. Two hollow silica tubes (HSTs) with different inner diameters were used to construct the FP cavities, and spliced with single-mode fiber (SMF) to make a gas pressure sensor with a closed cavity FPI and an open cavity FPI in series. The experimental results show that the proposed sensor achieves a high gas pressure sensitivity of-44.31 nm/MPa in the range of 0-2.2 MPa due to the Vernier amplification effect and a very low temperature cross-sensitivity of-0.6 KPa/celcius. This sensor has high sensitivity, wide measurement range, small temperature crosstalk, good robustness and low production cost in gas pressure measurement.
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页数:6
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