Gate-Last MoS2 Transistors for Active-Matrix Display Driving Circuits

被引:2
作者
Peng, Yalin [1 ,2 ,3 ]
Li, Lu [1 ,2 ,3 ]
Huang, Biying [1 ,2 ,3 ]
Tian, Jinpeng [1 ,2 ,3 ]
Li, Xiuzhen [1 ,2 ,3 ]
Tang, Jian [1 ,2 ,3 ]
Chu, Yanbang [1 ,2 ,3 ]
Shi, Dongxia [1 ,2 ,3 ]
Du, Luojun [1 ,2 ,3 ]
Li, Na [4 ]
Zhang, Guangyu [1 ,2 ,3 ,4 ]
机构
[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100190, Peoples R China
[3] Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100190, Peoples R China
[4] Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China
基金
美国国家科学基金会; 国家重点研发计划;
关键词
active matrix; 2D semiconductors; display backplane; gate-last fabrication; MoS2; thin-film transistors; THIN; FABRICATION;
D O I
10.1002/adfm.202304879
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Advancements in display technology have primarily focused on discovering new materials to develop thin-film transistors (TFTs) that complement mainstream technologies. The emerging 2D semiconductors are one of the most promising candidates due to their ultra-thin thickness, exceptional electrical qualities, and large-scale availability. However, these atomically thin materials are delicate and typically prepared through standard gate-first fabrication processes, necessitating their transfer onto specific substrates. In this study, a demonstration of an in situ gate-last process for 2D semiconductor-based TFTs technology is presented. This approach bypasses the yield-limiting transfer process, enabling large-scale display applications. The as-fabricated MoS2 TFTs retains their intrinsic properties with a current density reaching approximate to approximate to 10 mu A mu m(-1). Additionally, it is successfully showcased that the two transistor-one capacitor active-matrix display driving circuits with a high pixel yield. The patterned matrix exhibits no crosstalk and can be driven by either the pulse amplitude modulation or pulse width modulation scheme, offering flexible applications.
引用
收藏
页数:8
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