[1] Zhejiang Univ, Coll Opt Sci & Engn, Natl Engn Res Ctr Opt Instruments, Hangzhou 310052, Peoples R China
[2] ZJU TU E Joint Res Inst Design Optoelect & Sensin, Hangzhou 310052, Peoples R China
[3] Eindhoven Univ Technol, Dept Mech Engn, Microsyst Res Sect, NL-5600 MB Eindhoven, Netherlands
[4] Ningbo Res Inst, Ningbo 310050, Peoples R China
[5] KTH Royal Inst Technol, Sch Elect Engn, Dept Electromagnet Engn, S-10044 Stockholm, Sweden