Perspective on ultrashort pulse laser micromachining

被引：3
|
作者：
Tuennermann, Andreas [1 ,3 ]
Momma, Carsten [2 ]
Nolte, Stefan [1 ,3 ]
机构：
[1] Friedrich Schiller Univ Jena, Inst Appl Phys, Abbe Ctr Photon, Albert Einstein Str 15, D-07745 Jena, Germany
[2] Cortronik GmbH, Friedrich Barnewitz Str 4a, D-18119 Rostock, Germany
[3] Fraunhofer Inst Appl Opt & Precis Engn IOF, Ctr Excellence Photon, Albert Einstein Str 7, D-07745 Jena, Germany
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2023年 / 129卷 / 02期
关键词：
Ultrashort pulse laser; Materials processing; Micromachining; Ablation; ABLATION; FEMTOSECOND; BURSTS;
D O I：
10.1007/s00339-023-06403-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ultrashort pulse lasers have found widespread applications in precise micromachining. Here, we present our brief perspective on the development of this innovative technology from the 1990s until today.
引用
收藏
页数：3
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