Low-Temperature Bonding Process by Silver Nanoparticles Paste for Power Electronic Devices

被引:3
作者
Fang, Yu-Chi [1 ]
Wang, Yu-Chieh [1 ]
Ouyang, Fan-Yi [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 30013, Taiwan
关键词
Silver nanoparticles; low-temperature bonding; power devices; die attachment; STRENGTH;
D O I
10.1007/s11664-022-10118-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A low-temperature bonding process using silver nanoparticles paste has been developed in air at temperatures of 150-250 degrees C under 5 MPa. The resistivity and hardness of the sintered Ag layer significantly improved when the sample was isothermally annealed above 180 degrees C. The microstructural evolution in the Ag nanoparticles paste at various bonding temperatures has been characterized, and their corresponding bonding strength analyzed. The results revealed that the joints can be successfully bonded at the lowest temperature of 150 degrees C for 1 h and at 180 degrees C for 10 min. No damage was found at the bonded interface after shear tests. In addition, thermal cycle tests were performed, and the microstructure evolution of the joints remained the same after the thermal cycle tests.
引用
收藏
页码:792 / 800
页数:9
相关论文
共 50 条
  • [41] Low-temperature wafer bonding: A study of void formation and influence on bonding strength
    Zhang, XX
    Raskin, JP
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (02) : 368 - 382
  • [42] Rapid and low temperature sintering bonding using Cu nanoparticle film for power electronic packaging
    Wu, Yongchao
    Zou, Guisheng
    Wang, Shuaiqi
    Guo, Wei
    Zhang, Hongqiang
    Peng, Peng
    Feng, Bin
    Liu, Lei
    APPLIED SURFACE SCIENCE, 2022, 603
  • [43] Prefabrication and Characterization of Copper-Silver Foam Composites for Low-Temperature Interconnection of Power Modules
    Fan, Yinxiang
    Yan, Haidong
    Li, Junye
    Lv, Guoping
    Liu, Yuncan
    Zhang, Yakun
    Liu, Chaohui
    JOURNAL OF ELECTRONIC MATERIALS, 2024, 53 (03) : 1360 - 1373
  • [44] Recycled low-temperature direct bonding of Si/glass and glass/glass chips for detachable micro/nanofluidic devices
    Wang, Chenxi
    Fang, Hui
    Zhou, Shicheng
    Qi, Xiaoyun
    Niu, Fanfan
    Zhang, Wei
    Tian, Yanhong
    Suga, Tadatomo
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2020, 46 (46): : 156 - 167
  • [45] Recycled low-temperature direct bonding of Si/glass and glass/glass chips for detachable micro/nanofluidic devices
    Chenxi Wang
    Hui Fang
    Shicheng Zhou
    Xiaoyun Qi
    Fanfan Niu
    Wei Zhang
    Yanhong Tian
    Tadatomo Suga
    Journal of Materials Science & Technology, 2020, 46 (11) : 156 - 167
  • [46] Pressureless sintering of nanosilver paste at low temperature to join large area (≥100 mm2) power chips for electronic packaging
    Fu, Shancan
    Mei, Yunhui
    Lu, Guo-Quan
    Li, Xin
    Chen, Gang
    Chen, Xu
    MATERIALS LETTERS, 2014, 128 : 42 - 45
  • [47] Novel Cu-Ag composite nanoparticle paste for low temperature bonding
    Liu, Jiaxin
    Mou, Yun
    Peng, Yang
    Sun, Qinglei
    Chen, Mingxiang
    MATERIALS LETTERS, 2019, 248 : 78 - 81
  • [48] Influential factors in low-temperature direct bonding of silicon dioxide
    Shirahama, Ryouya
    Duangchan, Sethavut
    Koishikawa, Yusuke
    Baba, Akiyoshi
    2015 INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE (3DIC 2015), 2015,
  • [49] Low-temperature bumpless bonding for surface acoustic wave components
    Wang, Ying-Hui
    Sato, Takahiro
    Sugiura, Tsuyoshi
    Suga, Tadatomo
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (04) : 2521 - 2525
  • [50] Low-temperature process of fine-pitch Au-Sn bump bonding in ambient air
    Wang, Ying-Hui
    Nishida, Kenji
    Hutter, Matthias
    Kimura, Takashi
    Suga, Tadatomo
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (4B): : 1961 - 1967