DUAL-FREQUENCY PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS FOR FUNDAMENTAL AND HARMONIC IMAGING

被引：0

作者：

Zhai, Yanfen ^{[1
]}

Maqsood, Waleed ^{[1
]}

Da, Zhou ^{[1
]}

Andrianov, Nikolai ^{[1
]}

Zhang, Yucheng ^{[1
]}

Moridi, Mohssen ^{[1
]}

Wu, Lixiang ^{[1
]}

机构：

[1] Silicon Austria Labs GmbH, A-9500 Villach, Austria

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Piezoelectric micromachined ultrasonic transducer (PMUT); dual frequency bands; harmonic imaging;

D O I：

10.1109/MEMS49605.2023.10052426

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A piezoelectric micromachined ultrasonic transducer (PMUT) with single oval vibrating diaphragm and dual frequency bands is developed for fundamental and harmonic imaging. The feature of dual-frequency bands of single PMUT element is verified by ultrasonic imaging experiments. The dual-frequency PMUT doubles the fractional bandwidth and halves the device dimensions compared to state of the art, which will enable ultrasonic imaging with combined advantages of high resolution via harmonic imaging and large depth via fundamental imaging. Therefore, it holds great promise for next-generation intravascular ultrasound (IVUS).

引用

页码：402 / 404

页数：3

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