Investigation into Oxidation Width of AlGaOx Cladding Layer for Circular Defect in 2D Photonic Crystal Laser

被引:1
作者
Zuo, Rubing [1 ]
Ye, Hanqiao [1 ]
Kinoshita, Ryosei [1 ]
Kataguchi, Munenari [1 ]
Morifuji, Masato [1 ]
Kajii, Hirotake [1 ]
Maruta, Akihiro [1 ]
Kondow, Masahiko [1 ]
机构
[1] Osaka Univ, Grad Sch Engn, Dept Quantum Informat Elect, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2024年 / 221卷 / 13期
关键词
oxidations; photonic crystals; thresholds; WAVE-GUIDE; INTEGRATION; MODE;
D O I
10.1002/pssa.202300556
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A circular defect in 2D photonic crystal (CirD) lasers is developed, which has the potential to achieve a target communication density of 10 Pbps cm-2 for intrachip optical communications by vertical current injection. The AlGaOx cladding layer's oxidation width strongly influences the device's light confinement and electronic resistance. Herein, samples with different oxidation widths are fabricated and the relationship between threshold power and oxidation width through photoexcitation is revealed. The optimal range of the oxidation width is found to be 349-439 nm, which can ensure low electronic resistance and low threshold power.
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页数:5
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