One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

被引：87

作者：

Kim, Joohoon ^{[1
]}

Kim, Wonjoong ^{[2
]}

Oh, Dong Kyo ^{[1
]}

Kang, Hyunjung ^{[1
]}

Kim, Hongyoon ^{[1
]}

Badloe, Trevon ^{[1
]}

Kim, Seokwoo ^{[1
]}

Park, Chanwoong ^{[2
]}

Choi, Hojung ^{[2
]}

Lee, Heon ^{[2
]}

Rho, Junsuk ^{[1
,3
,4
,5
]}

机构：

[1] Pohang Univ Sci & Technol POSTECH, Dept Mech Engn, Pohang 37673, South Korea

[2] Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea

[3] Pohang Univ Sci & Technol POSTECH, Dept Chem Engn, Pohang 37673, South Korea

[4] POSCO POSTECH RIST Convergence Res Ctr Flat Opt &, Pohang 37673, South Korea

[5] Natl Inst Nanomat Technol NINT, Pohang 37673, South Korea

来源：

LIGHT-SCIENCE & APPLICATIONS | 2023年 / 12卷 / 01期

基金：

新加坡国家研究基金会;

关键词：

CIRCULAR-DICHROISM;

D O I：

10.1038/s41377-023-01086-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO2) nanoparticles in a UV-curable resin, ZrO2 nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO2 nano-PER, the UV-curable resin enables direct pattern transfer and ZrO2 nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept, UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept, UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images. The proposed method enables repeat and rapid manufacturing of UV metasurfaces, and thus will bring UV metasurfaces more close to real life.

引用

页数：7

共 42 条

[1] Liquid crystal-powered Mie resonators for electrically tunable photorealistic color gradients and dark blacks [J].