Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb3Sn film on Nb superconducting radiofrequency cavities

被引：1
作者：
Shakel, Md Sharifuzzaman [1 ,2 ]
Sayeed, Md Nizam [1 ,2 ]
Eremeev, Grigory V. [3 ]
Valente-Feliciano, Anne-Marie [4 ]
Pudasaini, Uttar [4 ]
Elsayed-Ali, Hani E. [1 ,2 ]
机构：
[1] Old Dominion Univ, Dept Elect & Comp Engn, Norfolk, VA 23529 USA
[2] Appl Res Ctr, 12050 Jefferson Ave, Newport News, VA 23606 USA
[3] Fermilab Natl Accelerator Lab, Batavia, IL 60510 USA
[4] Thomas Jefferson Natl Accelerator Facil, Newport News, VA 23606 USA
来源：
VACUUM | 2023年 / 217卷
关键词：
Nb3Sn thin film; Cylindrical magnetron sputtering; Crystalline structure; Superconducting properties; NIOBIUM;
D O I：
10.1016/j.vacuum.2023.112563
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A DC cylindrical magnetron sputter coater was commissioned and used to coat Nb 2.6 GHz superconducting radiofrequency (SRF) cavity with Nb3Sn. The sputter coater has two identical cylindrical magnetrons that can move, with a controlled speed, along the axis of the SRF cavity to coat the inside surface of the cavity. The design of the sputter coater is discussed, along with its performance. Initially, a sample holder that allows coating on flat substrates at positions similar to the equator and beam tubes of a 2.6 GHz SRF cavity was used to test conditions for fabricating Nb3Sn layers. Multilayers of Nb and Sn were sequentially sputtered on flat Nb and sapphire substrates mounted on the equivalent positions of the cavity's beam tubes and the equator using the two identical cylindrical magnetrons. Then, the Nb/Sn multilayers were annealed at 950 degrees C for 3 h. The similar to 1.2 mu m thick Nb3Sn film did not show any other Nb-Sn compounds and had a superconducting transition temperature of 17.61-17.76 K. The 2.6 GHz SRF cavity was coated using similar conditions as flat samples. Cryogenic RF testing of the Nb3Sn-coated cavity demonstrated a quality factor of 3.2 x 10(8) at an accelerating gradient of 5 MV/m at 4.4 K.
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页数：11
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