共 73 条
- [1] Estimation of the mechanical stiffness constant of MEMS-based parallel-plate micro-actuators [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2021, 27 (07): : 2751 - 2759
- [4] [Anonymous], NIRM U INT C ENG NUI, P1
- [5] dos Santos JVA, 2012, SHOCK VIB, V19, P251, DOI [10.1155/2012/307806, 10.3233/SAV-2011-0627]