[1] Peking Univ, Sch Integrated Circuits, Natl Key Lab Adv Micro & Nano Manufacture Technol, Beijing 100871, Peoples R China
[2] Beijing Adv Innovat Ctr Integrated Circuits, Beijing 100871, Peoples R China
[3] Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
[4] Beijing Graphene Inst, Beijing 100095, Peoples R China
[5] Beijing Univ Chem Technol, State Key Lab Organ Inorgan Composites, Beijing 100029, Peoples R China
[6] Soochow Univ, Soochow Inst Energy & Mat Innovat, Coll Energy, Key Lab Adv Carbon Mat & Wearable Energy Technol J, Suzhou 215006, Peoples R China