A Linear Non-Contact Measurement of Dielectric Thickness with μm-Resolution

被引：0
|
作者：
Rastogi, Surbhika [1 ]
Devaraj, Surya Varchasvi [1 ]
Zele, Rajesh [1 ]
机构：
[1] Indian Inst Technol, Dept Elect Engn, Bombay, Maharashtra, India
来源：
2023 IEEE SENSORS | 2023年
关键词：
capacitance; thickness measurement; dielectric; sensors; CAPACITANCE;
D O I：
10.1109/SENSORS56945.2023.10325239
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents a novel system for non-contact thickness measurement of dielectrics with lossless sensitivity. The proposed system incorporates a high-impedance alternating current source and a circular planar capacitance probe to precisely sense dielectric thickness variations. Experimental results demonstrate >99.7% linearity for dielectric samples upto 1000 mu m thickness, with a sigma variation of 1.2% observed for a 200 mu m thick dielectric sample.
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页数：4
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