Ultra-high thermal stability InAs/GaAs quantum dot lasers grown on on-axis Si (001) with a record-high continuous-wave operating temperature of 150 °C

被引:19
作者
Lv, Zunren [1 ,2 ]
Wang, Shuai [1 ,2 ]
Wang, Shenglin [1 ,2 ]
Chai, Hongyu [1 ,2 ]
Meng, Lei [1 ,2 ]
Yang, Xiaoguang [1 ,2 ]
Yang, Tao [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
Buffer layers - Continuous wave lasers - Gallium arsenide - III-V semiconductors - Indium arsenide - Low power electronics - Molecular beam epitaxy - Nanocrystals - Optical waveguides - Photonic devices - Pulsed lasers - Semiconducting gallium - Semiconductor quantum dots - Silicon photonics - Temperature - Thermodynamic stability;
D O I
10.1364/OE.494251
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Direct epitaxial growth of group III-V light sources with excellently thermal performance on silicon photonics chips promises low-cost, low-power-consumption, high-performance photonic integrated circuits. Here, we report on the achievement of ultra-high thermal stability 1.3 & mu;m InAs/GaAs quantum dot (QD) lasers directly grown on an on-axis Si (001) with a record-high continuous-wave (CW) operating temperature of 150 & DEG;C. A GaAs buffer layer with a low threading dislocation density (TDD) of 4.3 x 106 cm-2 was first deposited using an optimized three-step growth method by molecular beam epitaxy. Then, an eight-layer QD laser structure with p-type modulation doping to enhance the temperature stability of the device was subsequently grown on the low TDD Si-based GaAs buffer layer. It is shown that the QD laser exhibits the ultra-high temperature stability with a characteristic temperature T0=& INFIN; and T1=& INFIN; in the wide temperature range of 10-75 & DEG;C and 10-140 & DEG;C, respectively. Moreover, a maximum CW operating temperature of up to 150 & DEG;C and a pulsed operating temperature of up to 160 & DEG;C are achieved for the QD laser. In addition, the QD laser shows a high CW saturation power of 50 mW at 85 & DEG;C and 19 mW at 125 & DEG;C, respectively.
引用
收藏
页码:24173 / 24182
页数:10
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