Tuning of Critical Temperature and Aging Effect of Ti Films For Superconducting Transition-Edge Sensors

被引：3

作者：

Zhang, W. ^{[1
]}

Wang, Z. ^{[1
]}

Li, P. Z. ^{[1
]}

Zhong, J. Q. ^{[1
]}

Ma, Q. X. ^{[1
,2
]}

Feng, Z. F. ^{[1
,2
]}

Zhou, K. M. ^{[1
]}

Miao, W. ^{[1
]}

Ren, Y. ^{[1
]}

Yao, Q. J. ^{[1
]}

Li, J. ^{[1
]}

Shi, S. C. ^{[1
]}

机构：

[1] Chinese Acad Sci, Purple Mt Observ, Nanjing 210023, Peoples R China

[2] Univ Sci & Technol China, Hefei 230026, Peoples R China

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2024年 / 214卷 / 3-4期

基金：

中国国家自然科学基金; 国家重点研发计划;

关键词：

Transition-edge sensor; Baking; Energy resolution;

D O I：

10.1007/s10909-023-03017-6

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting transition-edge sensors (TESs) are widely used to detect electromagnetic radiation ranging from millimeter wave to gamma-ray photons. The energy resolution of TESs is mainly determined by their critical temperature (TC). We propose to tune the TC of Ti film by baking in air for a period at a moderate temperature and find that TC is inversely proportional to the logarithm of baking time (tbaking) for a given baking temperature (Tbaking), but scales with the square of Tbaking for a given tbaking. Ti film covered by a thin Au protection layer follows the same trend when baked in air. Based on the XPS analysis, we attribute the change in TC of Ti films to the oxidation at the surface and diffusion of oxygen into the films. In addition, the aging effect of Ti films is similar to that of baking in air but with much slower change rate.

引用

页码：106 / 112

页数：7

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