On overtravel and skate in cantilever-based probes for on-wafer measurements (vol 32, 057001, 2022)

被引：1

作者：

Arscott, Steve ^{[1
]}

机构：

[1] Univ Lille, Univ Polytech Hauts de France, CNRS, Cent Lille,UMR IEMN 8520, F-59000 Lille, France

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2023年 / 33卷 / 09期

关键词：

ATOMIC-FORCE MICROSCOPE; SPRING CONSTANT; TILT;

D O I：

10.1088/1361-6439/ace834

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This corrigendum reformulates the equations for the normal contact force of the probe and the condition for tip skate in the presence of friction. This enables a formulation of the effective spring constant of a tilted probe to be written down. This model is compared to that of others.

引用

页数：2

共 3 条

[1] On overtravel and skate in cantilever-based probes for on-wafer measurements
Arscott, Steve
Journal of Micromechanics and Microengineering, 2022, 32 (05):
[2] On overtravel and skate in cantilever-based probes for on-wafer measurements
Arscott, Steve
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2022, 32 (05)
[3] A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements
Daffe, Khadim
Marzouk, Jaouad
Boyaval, Christophe
Dambrine, Gilles
Hadaddi, Kamel
Arscott, Steve
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2022, 32 (01)

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