Advances in Fiber-Optic Extrinsic FabryPerot Interferometric Physical and Mechanical Sensors: A Review

被引:70
作者
Zhu, Chen [1 ]
Zheng, Hongkun [1 ]
Ma, Lingmei [1 ]
Yao, Zheyi [2 ]
Liu, Bo [1 ]
Huang, Jie [3 ]
Rao, Yunjiang [4 ,5 ]
机构
[1] Res Ctr Optic Fiber Sensing, Zhejiang Lab, Hangzhou 311100, Peoples R China
[2] Nanjing Univ Sci & Technol, Sch Elect Engn & Opto Elect Technol, Nanjing 210094, Peoples R China
[3] Missouri Univ Sci & Technol, Dept Elect & Comp Engn, Rolla, MO 65409 USA
[4] Res Ctr Optic Fiber Sensing, Zhejiang Lab, Hangzhou 311100, Peoples R China
[5] Univ Elect Sci & Technol China, Key Lab Optic Fiber Sensing & Communicat, Chengdu 611731, Sichuan, Peoples R China
关键词
Extrinsic Fabry-Perot interferometer (EFPI); Fabry-Perot interferometer (FPI); fiber-optic sensor; interferometer; physical and mechanical sensor; PEROT PRESSURE SENSOR; FORCE SENSOR; ACOUSTIC SENSOR; ALL-FIBER; STRAIN SENSOR; DISPLACEMENT SENSOR; HUMIDITY SENSOR; MICRO-CAVITY; TILT SENSOR; LOW-COST;
D O I
10.1109/JSEN.2023.3244820
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Fabry-Perot interferometers (FPIs) have found a multitude of scientific and industrial applications ranging from gravitational wave detection, high-resolution spectroscopy, and optical filters to quantum optomechanics. Integrated with optical fiber waveguide technology, the fiber-optic FPIs have emerged as a unique candidate for high-sensitivity sensing and have undergone tremendous growth and advancement in the past two decades with their successful applications in an expansive range of fields. The extrinsic cavity-based devices, i.e., the fiber-optic extrinsic FPIs (EFPIs), enable great flexibility in the design of the sensitive Fabry-Perot cavity combined with state-of-the-art micromachining and conventional mechanical fabrication, leading to the development of a diverse array of EFPI sensors targeting at different physical quantities. Here, we summarize the recent progress of fiber-optic EFPI sensors, providing an overview of different physical and mechanical sensors based on the FPI principle, with a special focus on displacement-related quantities, such as strain, force, tilt, vibration and acceleration, pressure, and acoustic. The working principle and signal demodulation methods are shown in brief. Perspectives on further advancement of EFPI sensing technologies are also discussed.
引用
收藏
页码:6406 / 6426
页数:21
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