Advances in Fiber-Optic Extrinsic FabryPerot Interferometric Physical and Mechanical Sensors: A Review

被引:51
|
作者
Zhu, Chen [1 ]
Zheng, Hongkun [1 ]
Ma, Lingmei [1 ]
Yao, Zheyi [2 ]
Liu, Bo [1 ]
Huang, Jie [3 ]
Rao, Yunjiang [4 ,5 ]
机构
[1] Res Ctr Optic Fiber Sensing, Zhejiang Lab, Hangzhou 311100, Peoples R China
[2] Nanjing Univ Sci & Technol, Sch Elect Engn & Opto Elect Technol, Nanjing 210094, Peoples R China
[3] Missouri Univ Sci & Technol, Dept Elect & Comp Engn, Rolla, MO 65409 USA
[4] Res Ctr Optic Fiber Sensing, Zhejiang Lab, Hangzhou 311100, Peoples R China
[5] Univ Elect Sci & Technol China, Key Lab Optic Fiber Sensing & Communicat, Chengdu 611731, Sichuan, Peoples R China
关键词
Extrinsic Fabry-Perot interferometer (EFPI); Fabry-Perot interferometer (FPI); fiber-optic sensor; interferometer; physical and mechanical sensor; PEROT PRESSURE SENSOR; FORCE SENSOR; ACOUSTIC SENSOR; ALL-FIBER; STRAIN SENSOR; DISPLACEMENT SENSOR; HUMIDITY SENSOR; MICRO-CAVITY; TILT SENSOR; LOW-COST;
D O I
10.1109/JSEN.2023.3244820
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Fabry-Perot interferometers (FPIs) have found a multitude of scientific and industrial applications ranging from gravitational wave detection, high-resolution spectroscopy, and optical filters to quantum optomechanics. Integrated with optical fiber waveguide technology, the fiber-optic FPIs have emerged as a unique candidate for high-sensitivity sensing and have undergone tremendous growth and advancement in the past two decades with their successful applications in an expansive range of fields. The extrinsic cavity-based devices, i.e., the fiber-optic extrinsic FPIs (EFPIs), enable great flexibility in the design of the sensitive Fabry-Perot cavity combined with state-of-the-art micromachining and conventional mechanical fabrication, leading to the development of a diverse array of EFPI sensors targeting at different physical quantities. Here, we summarize the recent progress of fiber-optic EFPI sensors, providing an overview of different physical and mechanical sensors based on the FPI principle, with a special focus on displacement-related quantities, such as strain, force, tilt, vibration and acceleration, pressure, and acoustic. The working principle and signal demodulation methods are shown in brief. Perspectives on further advancement of EFPI sensing technologies are also discussed.
引用
收藏
页码:6406 / 6426
页数:21
相关论文
共 50 条
  • [1] Wearable fiber-optic sensors: Recent advances and future opportunities
    Zhao Lei
    Tan YingLing
    Li Hang
    Chen Jin-Hui
    SCIENTIA SINICA-PHYSICA MECHANICA & ASTRONOMICA, 2023, 53 (11)
  • [2] Fiber-Optic Microstructure Sensors: A Review
    Rani, Zengling
    He, Xiu
    Rao, Yunjiang
    Sun, Dong
    Qin, Xiaojuan
    Zeng, Debiao
    Chu, Wangwei
    Li, Xiankun
    Wei, Yabin
    PHOTONIC SENSORS, 2021, 11 (02) : 227 - 261
  • [3] Fiber-Optic Chemical Sensors and Fiber-Optic Bio-Sensors
    Pospisilova, Marie
    Kuncova, Gabriela
    Troegl, Josef
    SENSORS, 2015, 15 (10) : 25208 - 25259
  • [4] Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review
    Islam, Md Rajibul
    Ali, Muhammad Mahmood
    Lai, Man-Hong
    Lim, Kok-Sing
    Ahmad, Harith
    SENSORS, 2014, 14 (04) : 7451 - 7488
  • [5] Advanced signal processing method for interferometric fiber-optic sensors with straightforward spectral detection
    Egorov, SA
    Mamaev, AN
    Likhachiev, IG
    Ershov, YA
    SENSORS AND CONTROLS FOR ADVANCED MANUFACTURING, 1997, 3201 : 44 - 48
  • [6] Sensitivity-Enhanced Extrinsic Fabry-Perot Interferometric Fiber-Optic Microcavity Strain Sensor
    Ma, Zhibo
    Cheng, Shaolei
    Kou, Wanying
    Chen, Haibin
    Wang, Wei
    Zhang, Xiongxing
    Guo, Tongxin
    SENSORS, 2019, 19 (19)
  • [7] Broadband Fiber-Optic Acoustic Sensors
    Wei, Heming
    Gong, Zhe
    Wu, Wenjing
    Che, Jiawei
    Zhang, Liang
    Pang, Fufei
    Wang, Tingyun
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2022, 40 (12) : 4033 - 4041
  • [8] Fundamentals of the interferometric fiber-optic gyroscope
    Lefevre, HC
    FIBER OPTIC GYROS: 20TH ANNIVERSARY CONFERENCE, 1996, 2837 : 2 - 17
  • [9] Fundamentals of the interferometric fiber-optic gyroscope
    Hervé C. Lefèvre
    Optical Review, 1997, 4 (1)
  • [10] Sulfur Hexafluoride-Filled Extrinsic Fabry-Perot Interferometric Fiber-Optic Sensors for Partial Discharge Detection in Transformers
    Dong, Bo
    Han, Ming
    Sun, Liqun
    Wang, Jiajun
    Wang, Yunjing
    Wang, Anbo
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (17-20) : 1566 - 1568