A FORCE-BALANCE CAPACITIVE MEMS GRAVIMETER WITH SUPERIOR RESPONSE TIME, SELF-NOISE AND DRIFT

被引：1

作者：

Gao, Le ^{[1
,2
]}

Li, Fangzheng ^{[1
,2
]}

Zhang, Jian ^{[1
,2
]}

Cai, Bingyang ^{[1
,2
]}

Wu, Wenjie ^{[1
,2
]}

Tu, Liangcheng ^{[3
,4
]}

机构：

[1] Huazhong Univ Sci & Technol, MOE Key Lab Fundamental Phys Quant Measurement, Hubei Key Lab Gravitat & Quantum Phys, PGMF, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China

[3] Sun Yat Sen Univ, TianQin Res Ctr Gravitat Phys, Zhuhai, Peoples R China

[4] Sun Yat Sen Univ, Sch Phys & Astron, Zhuhai, Peoples R China

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

基金：

中国国家自然科学基金;

关键词：

electromagnetic force-balance; MEMS gravimeter; capacitive displacement transducer; earth tide; dynamic response; SENSORS;

D O I：

10.1109/MEMS49605.2023.10052380

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a MEMS gravimeter with a capacitive displacement transducer and a force-balance system for superior response time, self-noise and drift compared to the state-of-the-art. It thus enables, for the first time, the measurements of low-frequency earth tide and high-frequency seismic motion simultaneously. More importantly, MEMS gravimeters with optimized dynamic response are crucial for a further wide field of applications, such as mobile gravity measurements.

引用

页码：837 / 840

页数：4

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