Wavefront measurement of a multilens optical system based on phase measuring deflectometry

被引:3
作者
Chen, Zhenyi [1 ]
Zhao, Wenchuan [2 ]
Zhang, Qican [3 ]
Peng, Jin [1 ]
Hou, Junyong [1 ]
机构
[1] Southwest Petr Univ, Sch Sci, Nanchong 637001, Peoples R China
[2] Inst Optoelect Technol, Chinese Acad Sci, Chengdu 610209, Peoples R China
[3] Sichuan Univ, Sch Elect & Informat Engn, Chengdu 610065, Peoples R China
关键词
phase measuring deflectometry; wavefront measurement; systematic errors; calibration; FRINGE PROJECTION PROFILOMETRY; ITERATIVE COMPENSATIONS; ALGORITHMS;
D O I
10.3788/COL202321.041201
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Usually, a multilens optical system is composed of multiple undetectable sublenses. Wavefront of a multilens optical system cannot be measured when classical transmitted phase measuring deflectometry (PMD) is used. In this study, a wavefront measuring method for an optical system with multiple optics is presented based on PMD. A paraxial plane is used to represent the test multilens optical system. We introduce the calibration strategy and mathematical deduction of gradient equations. Systematic errors are suppressed with an N-rotation test. Simulations have been performed to demonstrate our method. The results showing the use of our method in multilens optical systems, such as the collimator and single-lens reflex camera lenses show that the measurement accuracy is comparable with those of interferometric tests.
引用
收藏
页数:7
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