OVER-1 GHZ BANDWIDTH FILTER BASED ON Y-128° CUT LITHIUM NIOBATE ON AMORPHOUS SILICON

被引：11

作者：

Zheng, Junyan ^{[1
]}

Xu, Jiashuai ^{[1
]}

Qian, Fangsheng ^{[1
]}

Yang, Yansong ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Hong Kong, Peoples R China

来源：

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2024年

基金：

中国国家自然科学基金;

关键词：

6G; acoustic wave; filter; Lamb wave; lithium niobate; MEMS; resonator; wideband; RESONATORS;

D O I：

10.1109/MEMS58180.2024.10439472

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128 degrees cut lithium niobate thin film to maximize the electromechanical coupling (k(t)(2)=48%). Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.

引用

页码：36 / 39

页数：4

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