Enhanced memristor-based gas sensor for fast detection using a porous carbon nanotube top electrode with membrane

被引:17
作者
Chae, Myoungsu [1 ,2 ]
Lee, Doowon [1 ,2 ]
Jung, Jinsu [1 ,2 ]
Kim, Hee-Dong [1 ,2 ]
机构
[1] Sejong Univ, Dept Semicond Syst Engn, Convergence Engn Intelligent Drone, 209 Neungdong Ro, Seoul 05006, South Korea
[2] Sejong Univ, Inst Semicond & Syst IC, 209 Neungdong Ro, Seoul 05006, South Korea
基金
新加坡国家研究基金会;
关键词
HYBRID;
D O I
10.1016/j.xcrp.2023.101659
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The detection speed of a memristor-based gas sensor (gasistor) is limited because it detects gas passing through the top electrode (TE). In this work, to enhance the response characteristics to nitric oxide (NO) for a hafnium dioxide (HfO2)-based gasistor, we propose the use of a porous carbon nanotube (CNT) electrode and N-[3-(tri-methoxysilyl)propyl]ethylenedi amine (en-APTAS) familiar with NO. First, the CNT as a TE provides approximately five times more sensitivity to 50-ppm NO than that with the conventional metal-TE. Also, when employing the en-APTAS of 1.5 wt % to further enhance the response/response time to NO, we observe a 2-fold higher response under 50-ppm NO at room temperature (RT), as well as a 134-s faster response time with en-APTAS due to the increased adsorption energy of the electrode. These results indicate that the use of both porous TE and an en-APTAS membrane with high adsorption energies can effectively improve the NO-sensing characteristics of the gasistor.
引用
收藏
页数:16
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