A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm

被引：1

作者：

Gurung, Lokesh ^{[1
]}

Miani, Theo ^{[1
]}

Sobreviela-Falces, Guillermo ^{[1
]}

Young, Douglas ^{[1
]}

Baker, Colin ^{[1
]}

Seshia, Ashwin ^{[2
]}

机构：

[1] Silicon Micrograv Ltd, Cambridge, England

[2] Univ Cambridge, Silicon Micrograv Ltd, Nanosci Ctr, Dept Engn, Cambridge, England

来源：

2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2023年

关键词：

MEMS; accelerometer; inertial sensor; resonant; sensor; bias; scale factor; high-performance; navigation; VBA;

D O I：

10.1109/INERTIAL56358.2023.10103976

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This paper reports results of a high-performance navigation-grade resonant microelectromechanical systems (MEMS) accelerometer with a +/- 25g dynamic range demonstrating a bias and scale factor (SF) repeatability of 30 mu g and 2 ppm respectively over an operational temperature range of -40 degrees to 80 degrees C. The output Allan deviation for measurements conducted at 30 degrees C reveals an in-run bias instability of 35 ng and a velocity random walk of 0.34 mu g/root Hz.

引用

页数：4