2D absolute position measurement based on the hybrid encoding method

This paper introduces a new method of absolute position measurement based on the hybrid encoding principle that can precisely measure the absolute position of a two-dimensional (2D) micro displacement table. The method uses pseudo-random sequences and binary codes to generate the long-distance position encoding sequences. It combines the encoding sequences with checkerboards to form a hybrid encoding to complete the design of the 2D encoding of plane positions. Then a 2D encoding disk is designed as a tool to measure 2D absolute position. Among them, the X and Y positions are designed by the modular approach, respectively, to efficiently detect the accuracy of 2D position values during the measurement. Moreover, the designed 2D encoding disk can quickly realize image correction. In order to verify the feasibility of the designed 2D encoding disk for measuring the 2D absolute position, the corresponding measurement system is built using a 2D encoding disk, a CCD camera, and a telecentric lens. The experimental results demonstrate that the average position deviation of the 2D absolute position measurement system is less than +/- 1 mu m.