A systematic study on self-catalyzed growth of InAs/GaSb axial heterostructured nanowires by MOCVD

被引:2
作者
Wang, Xiaoye [1 ,2 ,3 ,4 ]
Yang, Xiaoguang [5 ,6 ]
Du, Wenna [7 ]
Yang, Tao [5 ,6 ]
机构
[1] Lanzhou Univ Technol, Coll Elect & Informat Engn, Lanzhou 730050, Peoples R China
[2] Lanzhou Univ Technol, Key Lab Gansu Adv Control Ind Proc, Lanzhou 730050, Peoples R China
[3] Lanzhou Univ Technol, Natl Demonstrat Ctr Expt Elect & Control Engn Educ, Lanzhou 730050, Peoples R China
[4] Lanzhou Univ Technol, Lab Nanoscale Semicond Measurement, Lanzhou 730050, Peoples R China
[5] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China
[6] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[7] Chinese Acad Sci, Natl Ctr Nanosci & Technol, CAS Ctr Excellence Nanosci, Key Lab Standardizat & Measurement Nanotechnol, Beijing 100190, Peoples R China
基金
中国国家自然科学基金;
关键词
InAs/GaSb; Axial heterojunction nanowires; Self-catalyzed growth; MOCVD;
D O I
10.1016/j.vacuum.2023.112794
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Traditional Au-catalyzed growth method of nanowires will mix Au atoms into Si substrates and InAs/GaSb axial heterojunction materials to introduce deep energy levels, which will seriously degrade the electrical and photoelectric properties of nanodevices. In this work, we studied in detail the effects of multiple growth parameters on self-catalyzed growth of InAs/GaSb axial heterostructured NWs on Si substrate by MOCVD. It is found that in the switching process from InAs material precursor to GaSb material precursor, if growth temperature of GaSb is not appropriate and switching time is too long, it will cause the decomposition and disappearance of InAs NWs, and directly terminate the realization of InAs/GaSb axial heterojunction NWs. Both the parameter windows of the growth temperature and V/III ratio are very narrow, which directly affects the growth trend of GaSb material in axial or radial deposition. It provides an important and meaningful method for self-catalyzed high-quality nanowires by MOCVD that up high pure GaSb nanowires requires the catalyzed guidance of alloy droplets and buffer seed nanowire and bottom InAs nanowires just meet both requirements.
引用
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页数:10
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