HIGH SENSITIVITY MEMS Z-AXIS ACCELEROMETER WITH IN-PLANE DIFFERENTIAL READOUT

被引：2

作者：

Zega, Valentina ^{[1
]}

Gattere, Gabriele ^{[2
]}

Riani, Manuel ^{[2
]}

Rizzini, Francesco ^{[2
]}

Frangi, Attilio ^{[1
]}

机构：

[1] Politecn Milan, Civil & Environm Engn Dept, Milan, Italy

[2] STMicroelectr, Monza, Italy

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

MEMS; z-axis accelerometer; motion conversion; high-sensitivity; differential readout; comb fingers;

D O I：

10.1109/MEMS49605.2023.10052375

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the innovative design and a preliminary experimental characterization of a miniaturized z-axis accelerometer. For the first time in a MEMS accelerometer, a motion conversion mechanism is implemented to allow an electrostatic readout based on in-plane comb fingers, thus overcoming the main limitations of out-of-plane parallel plate detection, e.g. nonlinearities, trade-off between sensitivity and full- scale range, pull-in, etc. The first prototype fabricated by exploiting the features of the Thelma-Double fabrication process shows an experimental sensitivity of 12.9 fF/g which agrees well with numerical predictions computed by considering nominal geometric dimension of the sensor.

引用

页码：37 / 40

页数：4

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