Molecular-beam epitaxy-grown HgCdTe infrared detector: Material physics, structure design, and device fabrication

被引:13
作者
Wang, Xiaohui [1 ,2 ]
Wang, Mengbo [1 ]
Liao, Yulong [1 ]
Zhang, Huaiwu [1 ]
Zhang, Baohui [3 ]
Wen, Tianlong [1 ]
Yi, Jiabao [4 ]
Qiao, Liang [5 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 611731, Peoples R China
[2] Univ Elect Sci & Technol China, Yangtze Delta Reg Inst Huzhou, Huzhou 313001, Peoples R China
[3] Kunming Inst Phys, Kunming 650223, Peoples R China
[4] Univ Newcastle, Global Innovat Ctr Adv Nanomat, Sch Engn, Newcastle, NSW 2308, Australia
[5] Univ Elect Sci & Technol China, Sch Phys, Chengdu 611731, Peoples R China
来源
SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY | 2023年 / 66卷 / 03期
基金
中国国家自然科学基金;
关键词
HgCdTe; infrared detector; MBE; etch pit density; FOCAL-PLANE ARRAYS; ATOMIC-FORCE MICROSCOPY; MBE GROWTH; DARK CURRENT; DISLOCATION DENSITY; ALLOY COMPOSITION; IR DETECTION; MWIR HGCDTE; SI; CDTE;
D O I
10.1007/s11433-022-2003-2
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Infrared (IR) detectors have important applications in numerous civil and military sectors. HgCdTe is one of the most important materials for IR detector manufacture. This review systematically discusses the progress of HgCdTe materials grown via molecular-beam epitaxy (MBE) for IR detection in terms of material physics, structure design, and fabrication. The material physics of HgCdTe includes crystal information, band structure, and electrical and optical properties. The characterization methods of the As-grown HgCdTe materials are also summarized. Then, four design structures of HgCdTe for IR detectors, with multilayer, superlattice, double-layer heterojunction, and barrier properties, which significantly improve the device performance, are discussed. The third section summarizes the studies on HgCdTe MBE-grown on different substrates, including CdZnTe, Si, and GaSb, in recent decades. This review discusses the factors influencing the growth of the HgCdTe film and their relationships and optimal conditions. Finally, we present the prospects and challenges associated with the fabrication and applications of HgCdTe materials for IR detectors.
引用
收藏
页数:26
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