High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices With Integrated PDMS Bumps

被引：5
作者：
Yin, Jiahao [1 ]
Luo, Yumeng [1 ]
Chen, Liang [2 ]
Wang, Qing [1 ,3 ]
Yu, Hongyu [1 ,3 ]
Li, Kwai Hei [1 ,3 ]
机构：
[1] Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[2] Foshan Elect & Lighting Co Ltd, Foshan 528000, Peoples R China
[3] Southern Univ Sci & Technol, Engn Res Ctr Three Dimens Integrat Guangdong Prov, Shenzhen 518055, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2023年 / 44卷 / 12期
基金：
中国国家自然科学基金;
关键词：
Force; Light emitting diodes; Photoconductivity; Optical sensors; Gallium nitride; Tactile sensors; Integrated optics; Microsensors; GaN; tactile sensor; optical sensor; integrated optical device;
D O I：
10.1109/LED.2023.3325467
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this letter, an optical three-axis tactile microsensor is fabricated and characterized. Through the monolithic integration design, the chip-scale GaN-based device consisting of one light emitter and four light detecting units is developed. By incorporating a flexible bump layer, the integrated device with a size of 1.3 x 1.3 x 1.4 mm(3) can effectively respond to the normal and shear forces, demonstrating a high resolution of 2 mN. The developed microsensor features a compact structure, small footprint, high stability, and three-axis high-resolution measurement capability, which makes it suitable for a variety of applications requiring precise force detection.
引用
收藏
页码：2035 / 2038
页数：4
相关论文
共 23 条
[1]  
Alspach A, 2019, 2019 2ND IEEE INTERNATIONAL CONFERENCE ON SOFT ROBOTICS (ROBOSOFT 2019), P597, DOI [10.1109/robosoft.2019.8722713, 10.1109/ROBOSOFT.2019.8722713]
[2]   A Chip-Scale GaN-Based Optical Pressure Sensor With Microdome-Patterned Polydimethylsiloxane (PDMS) [J].
An, Xiaoshuai ;
Luo, Yumeng ;
Yu, Binlu ;
Chen, Liang ;
Li, Kwai Hei .
IEEE ELECTRON DEVICE LETTERS, 2021, 42 (10) :1532-1535
[3]   A Highly Sensitive Multimodal Tactile Sensing Module with Planar Structure for Dexterous Manipulation of Robots [J].
Bok, Bo-Gyu ;
Jang, Jin-Seok ;
Kim, Min-Seok .
ADVANCED INTELLIGENT SYSTEMS, 2023, 5 (06)
[4]   Design and Fabrication of a Four-Arm-Structure MEMS Gripper [J].
Chen, Tao ;
Chen, Liguo ;
Sun, Lining ;
Li, Xinxin .
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2009, 56 (04) :996-1004
[5]   A Highly Sensitive Tactile Sensor Using a Pyramid-Plug Structure for Detecting Pressure, Shear Force, and Torsion [J].
Choi, Daehwan ;
Jang, Sukjin ;
Kim, Joo Sung ;
Kim, Hyung-Jun ;
Kim, Do Hwan ;
Kwon, Jang-Yeon .
ADVANCED MATERIALS TECHNOLOGIES, 2019, 4 (03)
[6]  
Donlon E, 2018, IEEE INT C INT ROBOT, P1927, DOI 10.1109/IROS.2018.8593661
[7]   Design, Modeling, and Validation of a Soft Magnetic 3-D Force Sensor [J].
Dwivedi, Anany ;
Ramakrishnan, Anand ;
Reddy, Aniketh ;
Patel, Kunal ;
Ozel, Selim ;
Onal, Cagdas D. .
IEEE SENSORS JOURNAL, 2018, 18 (09) :3852-3863
[8]   Fiber Bragg Grating-Based Triaxial Force Sensor With Parallel Flexure Hinges [J].
Gao, Anzhu ;
Zhou, Yuanyuan ;
Cao, Lei ;
Wang, Zhidong ;
Liu, Hao .
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2018, 65 (10) :8215-8223
[9]   A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS [J].
Jing, Jixiang ;
An, Xiaoshuai ;
Luo, Yumeng ;
Chen, Liang ;
Chu, Zhiqin ;
Li, Kwai Hei .
ACS APPLIED ELECTRONIC MATERIALS, 2021, 3 (05) :1982-1987
[10]   Flexible Tri-Axis Tactile Sensor Using Spiral Inductor and Magnetorheological Elastomer [J].
Kawasetsu, Takumi ;
Horii, Takato ;
Ishihara, Hisashi ;
Asada, Minoru .
IEEE SENSORS JOURNAL, 2018, 18 (14) :5834-5841
123